Continuous Inkjet Drop Generators Fabricated From Plastic Substrates
Fabrication of a functional continuous inkjet drop generator from plastic substrates by exclusively using micro- electromechanical systems (MEMS) processing steps is reported. Polyimide and poly(ethylene naphthalate) sheets that are laminated to a silicon carrier wafer are investigated as the drop g...
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Published in | Journal of microelectromechanical systems Vol. 16; no. 5; pp. 1080 - 1086 |
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Main Author | |
Format | Journal Article |
Language | English |
Published |
New York, NY
IEEE
01.10.2007
Institute of Electrical and Electronics Engineers The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subjects | |
Online Access | Get full text |
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Abstract | Fabrication of a functional continuous inkjet drop generator from plastic substrates by exclusively using micro- electromechanical systems (MEMS) processing steps is reported. Polyimide and poly(ethylene naphthalate) sheets that are laminated to a silicon carrier wafer are investigated as the drop generator substrate, and the MEMS processing methods used and associated challenges are discussed in detail. Successful generation of drops in a 600-nozzles-per-inch array that are as small as 2.4 pL in volume (16.5 mum in diameter) at drop velocities of 15.5 m/s is realized with these devices. |
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AbstractList | Fabrication of a functional continuous inkjet drop generator from plastic substrates by exclusively using micro- electromechanical systems (MEMS) processing steps is reported. Polyimide and poly(ethylene naphthalate) sheets that are laminated [abstract truncated by publisher]. Fabrication of a functional continuous inkjet drop generator from plastic substrates by exclusively using micro- electromechanical systems (MEMS) processing steps is reported. Polyimide and poly(ethylene naphthalate) sheets that are laminated to a silicon carrier wafer are investigated as the drop generator substrate, and the MEMS processing methods used and associated challenges are discussed in detail. Successful generation of drops in a 600-nozzles-per-inch array that are as small as 2.4 pL in volume (16.5 mum in diameter) at drop velocities of 15.5 m/s is realized with these devices. |
Author | Vaeth, K.M. |
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Copyright | 2007 INIST-CNRS Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2007 |
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Keywords | plastics Ethylene Drops Electric generators Polyimides Micromachining Inkjet printing Silicon Microelectromechanical device |
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References | rowan (ref4) 1995; 31 trauernicht (ref6) 2001 (ref8) 2002 chwalek (ref5) 2001 (ref3) 2003 ref10 ref2 ref1 (ref7) 2002 (ref9) 0 |
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SubjectTerms | Applied sciences Arrays Automotive materials Carriers Devices Exact sciences and technology Generators Inkjet printing Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microelectromechanical systems micromachining Micromechanical devices Micromechanical devices and systems Moisture Optical device fabrication Optical materials Physics Plastics Polyimide resins Polyimides Polymers Precision engineering, watch making Sheet materials Silicon compounds Silicon substrates Wafers |
Title | Continuous Inkjet Drop Generators Fabricated From Plastic Substrates |
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