Continuous Inkjet Drop Generators Fabricated From Plastic Substrates
Fabrication of a functional continuous inkjet drop generator from plastic substrates by exclusively using micro- electromechanical systems (MEMS) processing steps is reported. Polyimide and poly(ethylene naphthalate) sheets that are laminated to a silicon carrier wafer are investigated as the drop g...
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Published in | Journal of microelectromechanical systems Vol. 16; no. 5; pp. 1080 - 1086 |
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Main Author | |
Format | Journal Article |
Language | English |
Published |
New York, NY
IEEE
01.10.2007
Institute of Electrical and Electronics Engineers The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subjects | |
Online Access | Get full text |
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Summary: | Fabrication of a functional continuous inkjet drop generator from plastic substrates by exclusively using micro- electromechanical systems (MEMS) processing steps is reported. Polyimide and poly(ethylene naphthalate) sheets that are laminated to a silicon carrier wafer are investigated as the drop generator substrate, and the MEMS processing methods used and associated challenges are discussed in detail. Successful generation of drops in a 600-nozzles-per-inch array that are as small as 2.4 pL in volume (16.5 mum in diameter) at drop velocities of 15.5 m/s is realized with these devices. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 1057-7157 1941-0158 |
DOI: | 10.1109/JMEMS.2007.900887 |