Continuous Inkjet Drop Generators Fabricated From Plastic Substrates

• Published in: Journal of microelectromechanical systems Vol. 16; no. 5; pp. 1080 - 1086
• Main Author: Vaeth, K.M.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01.10.2007; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Applied sciences; Arrays; Automotive materials; Carriers; Devices; Exact sciences and technology; Generators; Inkjet printing; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Microelectromechanical systems; micromachining; Micromechanical devices; Micromechanical devices and systems; Moisture; Optical device fabrication; Optical materials; Physics; Plastics; Polyimide resins; Polyimides; Polymers; Precision engineering, watch making; Sheet materials; Silicon compounds; Silicon substrates; Wafers; plastics; Ethylene; Drops; Electric generators; Polyimides; Micromachining; Inkjet printing; Silicon; Microelectromechanical device
• ISSN: 1057-7157; 1941-0158
• DOI: 10.1109/JMEMS.2007.900887

Fabrication of a functional continuous inkjet drop generator from plastic substrates by exclusively using micro- electromechanical systems (MEMS) processing steps is reported. Polyimide and poly(ethylene naphthalate) sheets that are laminated to a silicon carrier wafer are investigated as the drop generator substrate, and the MEMS processing methods used and associated challenges are discussed in detail. Successful generation of drops in a 600-nozzles-per-inch array that are as small as 2.4 pL in volume (16.5 mum in diameter) at drop velocities of 15.5 m/s is realized with these devices.