Ion beam etching of PZT thin films: Influence of grain size on the damages induced

• Published in: Journal of the European Ceramic Society Vol. 25; no. 12; pp. 2269 - 2272
• Main Authors: Soyer, C., Cattan, E., Rèmiens, D.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Oxford Elsevier Ltd 2005; Elsevier
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Dielectric, piezoelectric, ferroelectric and antiferroelectric materials; Dielectrics, piezoelectrics, and ferroelectrics and their properties; Electrical properties; Etching damage; Exact sciences and technology; Grain size; Materials science; Niobates, titanates, tantalates, pzt ceramics, etc; Physics; PZT; Structure and morphology; thickness; Surface cleaning, etching, patterning; Surface treatments; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology; Grain size; PZT; Films; Electrical properties; Etching damage; Patterning; Lead titanates; Surface treatments; Experimental study; Lead zirconates; Magnetrons; Ion beam etching; Lead Titanates Zirconates; Microstructure; Radiofrequency sputtering; Ferroelectric thin films
• ISSN: 0955-2219; 1873-619X
• DOI: 10.1016/j.jeurceramsoc.2005.03.043

Ion beam etching (IBE) of sputtered Pb(Zr 0.54,Ti 0.46)O 3 has been performed using pure Ar gas. We have studied the damages induced by the etching process on the microstructural and electrical properties. In a previous study, we had demonstrated the influence of etching parameters on the extent of the degradations. We evaluate now the influence of the microstructure (grain size) of the PZT thin film. Indeed, we can obtain sputtered PZT thin films with small (<1.5 μm) and large (≫1.5 μm) grain size. In the first part, we compare the properties of these two types of PZT thin films before etching. In the second part, we compare the results obtained after etching. The properties (particularly the roughness and the ferroelectric properties) of PZT films with large grain size appear to be more damaged after IBE.