Transfer Printing of Au Micropatterns on Polyimide Films

The transfer printing of Au micropatterns onto a polyimide (PI) film was investigated, and the optimum transfer conditions were obtained. In this study, micropatterns with widths of 25 μm and 75 μm were successfully transferred onto a PI film at a molding temperature of 150 °C for 5 s under a moldin...

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Bibliographic Details
Published inJournal of Photopolymer Science and Technology Vol. 26; no. 3; pp. 309 - 312
Main Authors Komori, Takayuki, Kosuge, Tatsuya, Kuroda, Keigo, Saito, Hirofumi, Kimura, Yohta, Fukushi, Yudai, Maenosono, Hirotaka, Koide, Shohei, Satano, Masahiro, Ikoma, Ryuta, Nishioka, Yasushiro
Format Journal Article
LanguageEnglish
Published Hiratsuka The Society of Photopolymer Science and Technology(SPST) 2013
Japan Science and Technology Agency
Subjects
electrode pattern
micropump
polyimide
transfer printing
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Summary:The transfer printing of Au micropatterns onto a polyimide (PI) film was investigated, and the optimum transfer conditions were obtained. In this study, micropatterns with widths of 25 μm and 75 μm were successfully transferred onto a PI film at a molding temperature of 150 °C for 5 s under a molding pressure of 2.5 MPa. This technique is expected to provide simplified processes in fabricating wiring patterns in microelectromechanical systems.
ISSN:0914-9244
1349-6336
DOI:10.2494/photopolymer.26.309