Dual channel heterodyne microscope

Summary Heterodyne measurement of the amplitude and phase of a cross‐polarized two‐frequency laser beam reflected from a patterned surface enables simultaneous imaging in both the amplitude and phase‐contrast modes. Such imaging duality provides additional information for inspection. Besides, spatia...

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Bibliographic Details
Published inJournal of microscopy (Oxford) Vol. 237; no. 2; pp. 178 - 191
Main Author PROTOPOPOV, V.
Format Journal Article
LanguageEnglish
Published Oxford, UK Blackwell Publishing Ltd 01.02.2010
Subjects
heterodyning
Imaging
phase contrast
super‐resolution
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Summary:Summary Heterodyne measurement of the amplitude and phase of a cross‐polarized two‐frequency laser beam reflected from a patterned surface enables simultaneous imaging in both the amplitude and phase‐contrast modes. Such imaging duality provides additional information for inspection. Besides, spatial resolution in the phase‐contrast mode of operation is not limited by the width of the focused beam and, therefore, may be better than that of traditional imaging techniques. This phenomenon, commonly referred to as super‐resolution, was experimentally observed.
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ISSN:0022-2720
1365-2818
DOI:10.1111/j.1365-2818.2009.03322.x