Magnetostrictive Performance of Electrodeposited TbxDy(1−x)Fey Thin Film with Microcantilever Structures

The microfabrication with a magnetostrictive TbxDy(1−x)Fey thin film for magnetic microactuators is developed, and the magnetic and magnetostrictive actuation performances of the deposited thin film are evaluated. The magnetostrictive thin film of TbxDy(1−x)Fey is deposited on a metal seed layer by...

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Published inMicromachines (Basel) Vol. 11; no. 5; p. 523
Main Authors Shim, Hang, Sakamoto, Kei, Inomata, Naoki, Toda, Masaya, Toan, Nguyen Van, Ono, Takahito
Format Journal Article
LanguageEnglish
Published Basel MDPI AG 21.05.2020
MDPI
Subjects
Acids
Actuation
Annealing
Aqueous solutions
Cantilever members
electrodeposition
Electrodes
Electrolytes
Grain size
Magnetic fields
Magnetism
Magnetostriction
Microactuators
Microscopy
Spectrum analysis
TbxDy(1−x)Fey
Terfenol-D
thin film
Thin films
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Summary:The microfabrication with a magnetostrictive TbxDy(1−x)Fey thin film for magnetic microactuators is developed, and the magnetic and magnetostrictive actuation performances of the deposited thin film are evaluated. The magnetostrictive thin film of TbxDy(1−x)Fey is deposited on a metal seed layer by electrodeposition using a potentiostat in an aqueous solution. Bi-material cantilever structures with the Tb0.36Dy0.64Fe1.9 thin-film are fabricated using microfabrication, and the magnetic actuation performances are evaluated under the application of a magnetic field. The actuators show large magnetostriction coefficients of approximately 1250 ppm at a magnetic field of 11000 Oe.
Bibliography:ObjectType-Article-1
SourceType-Scholarly Journals-1
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ISSN:2072-666X
2072-666X
DOI:10.3390/mi11050523