Design, Manufacture and Test of Piezoelectric Cantilever-Beam Energy Harvesters with Hollow Structures

This article presents a single-crystal piezoelectric energy harvester (PEH) with a trapezoidal hollow hole that can obtain high energy density at low frequency. Harvesters with a hollow structure were fabricated through a series of manufacturing processes such as thermocompression bonding, screen pr...

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Bibliographic Details
Published inMicromachines (Basel) Vol. 12; no. 9; p. 1090
Main Authors Wang, Baozhi, Zhang, Chenggong, Lai, Liyan, Dong, Xuan, Li, Yigui
Format Journal Article
LanguageEnglish
Published Basel MDPI AG 10.09.2021
MDPI
Subjects
bulk PZT
Cantilever beams
Composite materials
Crystal structure
Design
Design optimization
Electric potential
Electrodes
Energy
Energy harvesting
Feasibility studies
Finite element method
Flux density
high power density
hollow out
Laser beam cutting
Lasers
Load matching
Load resistance
low frequency
Maximum power density
Optimization
Piezoelectricity
Resonance
Screen printing
Simulation
Single crystals
single-crystal PEH
Stainless steel
Stainless steels
Substrates
Voltage
Wireless networks
China
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Summary:This article presents a single-crystal piezoelectric energy harvester (PEH) with a trapezoidal hollow hole that can obtain high energy density at low frequency. Harvesters with a hollow structure were fabricated through a series of manufacturing processes such as thermocompression bonding, screen printing and laser cutting. Finite element analysis (FEA) and experimental results showed that using low modulus brass instead of stainless steel as the PEH substrate enhances the voltage output of the device, and the hollow design greatly increases the overall stress level and power density. In addition, the developed PEH with a trapezoidal hole obtained the best output performance; when the acceleration, resonance frequency and matched load resistance were 0.5 g, 56.3 Hz and 114 kΩ, respectively, the peak voltage was 17 V and the power density was 2.52 mW/cm3. Meanwhile, compared with the unhollowed device, the peak voltage and maximum power density of the proposed PEH were increased by 30.7% and 24.4%, respectively, and the resonance frequency was reduced by 7%. This study verified the feasibility of the optimized design through simulation and experimental comparison.
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ISSN:2072-666X
2072-666X
DOI:10.3390/mi12091090