Phase Formation and Thermal Stability of Reactively Sputtered YTaO4–ZrO2 Coatings

Y(1−x)/2Ta(1−x)/2ZrxO2 coatings with 0 to 44 mol% ZrO2 were synthesized by sputtering. Phase-pure M’-YTaO4 coatings were obtained at a substrate temperature of 900 °C. Alloying with ZrO2 resulted in the growth of M’ along with t-Zr(Y,Ta)O2 for ≤15 mol%, while for ≥28 mol%, ZrO2 X-ray diffraction (XR...

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Published inMaterials Vol. 14; no. 3; p. 692
Main Authors Stelzer, Bastian, Pingen, Katrin, Hans, Marcus, Holzapfel, Damian M., Richter, Silvia, Mayer, Joachim, Pradeep, Konda Gokuldoss, Schneider, Jochen M.
Format Journal Article
LanguageEnglish
Published Basel MDPI AG 02.02.2021
MDPI
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Summary:Y(1−x)/2Ta(1−x)/2ZrxO2 coatings with 0 to 44 mol% ZrO2 were synthesized by sputtering. Phase-pure M’-YTaO4 coatings were obtained at a substrate temperature of 900 °C. Alloying with ZrO2 resulted in the growth of M’ along with t-Zr(Y,Ta)O2 for ≤15 mol%, while for ≥28 mol%, ZrO2 X-ray diffraction (XRD) phase-pure metastable t was formed, which may be caused by small grain sizes and/or kinetic limitations. The former phase region transformed into M’ and M and the latter to an M’ + t and M + t phase region upon annealing to 1300 and 1650 °C, respectively. In addition to M and t, T-YTa(Zr)O4 phase fractions were observed at room temperature for ZrO2 contents ≥28 mol% after annealing to 1650 °C. T phase fractions increased during in situ heating XRD at 80 °C. At 1650 °C, a reaction with the α-Al2O3 substrate resulted in the formation of AlTaO4 and an Al-Ta-Y-O compound.
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ISSN:1996-1944
1996-1944
DOI:10.3390/ma14030692