Figure correction of a Wolter mirror master mandrel by organic abrasive machining

In this study, figure correction of a master mandrel of a Wolter mirror by organic abrasive machining (OAM) was demonstrated. In OAM, a flow of slurry, dispersed with organic particles, locally removes the surface of a workpiece in contact with a rotating machining tool. A computer-controlled machin...

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Published inReview of scientific instruments Vol. 94; no. 5
Main Authors Egawa, Satoru, Matsuzawa, Yusuke, Hiraguri, Kentaro, Motoyama, Hiroto, Yamaguchi, Gota, Yokomae, Shunya, Takei, Yoshinori, Kume, Takehiro, Owada, Shigeki, Tono, Kensuke, Yabashi, Makina, Hashizume, Hirokazu, Mimura, Hidekazu
Format Journal Article
LanguageEnglish
Published United States 01.05.2023
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Summary:In this study, figure correction of a master mandrel of a Wolter mirror by organic abrasive machining (OAM) was demonstrated. In OAM, a flow of slurry, dispersed with organic particles, locally removes the surface of a workpiece in contact with a rotating machining tool. A computer-controlled machining system was used to perform the selective removal of a fused silica surface at a spatial resolution of 200 µm. A master mandrel of a Wolter mirror for soft x-ray microscopes was fabricated with a figure accuracy of <1 nm root mean square, which is sufficient for diffraction-limited imaging at a wavelength of 10 nm.
ISSN:1089-7623
DOI:10.1063/5.0145122