An Improved Difference Temperature Compensation Method for MEMS Resonant Accelerometers

• Published in: Micromachines (Basel) Vol. 12; no. 9; p. 1022
• Main Authors: Cai, Pengcheng, Xiong, Xingyin, Wang, Kunfeng, Wang, Jiawei, Zou, Xudong
• Format: Journal Article
• Language: English
• Published: Basel MDPI AG 27.08.2021; MDPI
• Subjects: Accelerometers; Algorithms; Ambience; Bias; Controllers; difference; Dynamic stability; Frequency drift; Geometry; Microelectromechanical systems; resonant accelerometer; Sensitivity; Sensors; Silicon; Temperature compensation; Temperature effects; Temperature sensors
• ISSN: 2072-666X; 2072-666X
• DOI: 10.3390/mi12091022

Resonant accelerometers are promising because of their wide dynamic range and long-term stability. With quasi-digital frequency output, the outputs of resonant accelerometers are less vulnerable to the noise from circuits and ambience. Differential structure is usually adopted in a resonant accelerometer to achieve higher sensitivity to acceleration and to reduce common noise at the same time. Ideally, a resonant accelerometer is only sensitive to external acceleration. However, temperature has a great impact on resonant accelerometers, causing unexcepted frequency drift. In order to cancel out the frequency drift caused by temperature change, an improved temperature compensation method for differential vibrating accelerometers without additional temperature sensors is presented in this paper. Experiment results demonstrate that the temperature sensitivity of the prototype sensor is reduced from 43.16 ppm/°C to 0.83 ppm/°C within the temperature range of −10 °C to 70 °C using the proposed method.