Effects of nitridation durations on the synthesis of wurtzite GaN thin films by spin coating method

• Published in: Journal of sol-gel science and technology Vol. 71; no. 2; pp. 329 - 332
• Main Authors: Fong, C. Y., Ng, S. S., Yam, F. K., Abu Hassan, H., Hassan, Z.
• Format: Journal Article
• Language: English
• Published: Boston Springer US 01.08.2014; Springer; Springer Nature B.V
• Subjects: Ceramics; Chemistry; Chemistry and Materials Science; Colloidal gels. Colloidal sols; Colloidal state and disperse state; Composites; Diffraction; Exact sciences and technology; Gallium nitrides; General and physical chemistry; Glass; Inorganic Chemistry; Materials Science; Mathematical morphology; Nanotechnology; Natural Materials; Nitrides; Optical and Electronic Materials; Original Paper; Preferred orientation; Reflectance; Scanning electron microscopy; Silicon; Sol gel process; Spin coating; Thin films; Wurtzite; X-ray diffraction; Thin films; X-ray diffraction; Sol–gel processes; Nitride materials; Synthesis; Sol gel process; Sol-gel processes; Spin-on coating; X ray diffraction; Gallium nitride; Thin film
• ISSN: 0928-0707; 1573-4846
• DOI: 10.1007/s10971-014-3381-x

In this paper, the effects of nitridation durations on the structural, surface morphologies and lattice vibrational properties of gallium nitride (GaN) thin films grown via spin coating method were reported. X-ray diffraction (XRD) results revealed that all the deposited GaN thin films have wurtzite structure and with GaN(002) preferred orientation. In addition, the crystallinity of the GaN thin films increases with increasing of nitridation durations from 15 to 75 min while it degrades at 105 min. Field-emission scanning electron microscopy observations showed that GaN thin films with hexagon grains were formed at nitridation duration of 45 and 75 min, whereas rose-like microstructures were formed at nitridation duration of 105 min. P -polarized infrared reflectance measurements demonstrated that the reststrahlen feature of GaN thin films gradually increases from 15 to 75 min and diminished at 105 min, which is consistent with the XRD results. Finally, all the results revealed that the duration of 75 min was the most efficient time for the nitridation process.