Nonconventional Tether Structure for Quality Factor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator

This article presents a new design of supporting tethers through the concept of force distribution. The transmitted force applied on tethers will be distributed on the new tether design area, resulting in low acoustic energy transferred to anchor boundaries and stored energy enhancement. This techni...

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Bibliographic Details
Published inMicromachines (Basel) Vol. 14; no. 10; p. 1965
Main Authors Awad, Mohammed, Workie, Temesgen Bailie, Bao, Jingfu, Hashimoto, Ken-ya
Format Journal Article
LanguageEnglish
Published Basel MDPI AG 01.10.2023
MDPI
Subjects
Acoustics
anchor loss
Communications equipment
Crystal oscillators
Force distribution
Internal energy
MEMS
Microelectromechanical systems
Piezoelectricity
Q factors
quality factor
Semiconductor industry
Software
tether
Tethers
Thin films
TPoS
New York
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Summary:This article presents a new design of supporting tethers through the concept of force distribution. The transmitted force applied on tethers will be distributed on the new tether design area, resulting in low acoustic energy transferred to anchor boundaries and stored energy enhancement. This technique achieves an anchor quality factor of 175,000 compared to 58,000 obtained from the conventional tether design, representing a three-fold enhancement. Furthermore, the unloaded quality factor of the proposed design improved from 23,750 to 27,442, representing a 1.2-fold improvement.
Bibliography:ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ISSN:2072-666X
2072-666X
DOI:10.3390/mi14101965