Silicon-Based Zipper Photonic Crystal Cavity Optomechanical System for Accelerometers

The cavity optomechanical accelerometer based on photonic crystal microcavities combines mechanical resonators with high-quality factor photonic crystal cavities. The mechanical vibrator is sensitive to weak force/displacement in mechanical resonance modes, which can achieve extremely low noise leve...

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Bibliographic Details
Published inMicromachines (Basel) Vol. 14; no. 10; p. 1870
Main Authors Tan, Hongyu, Pan, Debin, Wang, Chensheng, Yao, Yuan
Format Journal Article
LanguageEnglish
Published Basel MDPI AG 29.09.2023
MDPI
Subjects
accelerometer
Accelerometers
Cavity resonators
Crystal structure
Design
Earthquakes
Gallium arsenide
high precision
Light
Low noise
Manufacturing
Microcavities
Noise control
Noise levels
Parameters
photonic crystal
Photonic crystals
Principles
Q factors
Resonance
Resonant frequencies
Silicon
Silicon nitride
zipper cavity
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Summary:The cavity optomechanical accelerometer based on photonic crystal microcavities combines mechanical resonators with high-quality factor photonic crystal cavities. The mechanical vibrator is sensitive to weak force/displacement in mechanical resonance modes, which can achieve extremely low noise levels and theoretically reach the standard qillatum noise limit. It is an important development direction for high-precision accelerometers. This article analyzes the principle and structural characteristics of a zipper type photonic crystal cavity optomechanical accelerometer, and designs a silicon-based zipper type photonic crystal cavity and mechanical vibrator structure applied to the accelerometer. The influence of the structural parameters of the zipper cavity on the optical Q factor was analyzed in detail. The resonant frequency of the optical cavity was controlled around 195 THz by adjusting the structural parameters, and the mechanical resonance characteristics of the mechanical vibrator and the optical cavity were analyzed. The effective mass of the optical cavity was 30 pg, and, with the addition of the mechanical vibrator, the effective mass was 3.1 ng. The optical mechanical coupling rate reached the GHz/nm level, providing guidance for the manufacturing and characterization of silicon-based zipper cavity accelerometers.
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ISSN:2072-666X
2072-666X
DOI:10.3390/mi14101870