Robust formation of quantum dots in GaAs/AlGaAs heterostructures for single-electron metrology
The robust and reproducible formation of a quantum dot is key for the development of tunable barrier single-electron pumps as a future quantum current standard. We investigate the fabrication process and perform electrical characterizations at cryogenic temperatures of quantum dots realized in a GaA...
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Published in | Metrologia Vol. 56; no. 1; pp. 14002 - 14008 |
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Main Authors | , , , , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Bristol
IOP Publishing
01.02.2019
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Subjects | |
Online Access | Get full text |
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Summary: | The robust and reproducible formation of a quantum dot is key for the development of tunable barrier single-electron pumps as a future quantum current standard. We investigate the fabrication process and perform electrical characterizations at cryogenic temperatures of quantum dots realized in a GaAs/AlGaAs heterostructure with lateral potential confinement by a combination of a shallow-etch technique and metallic top-gates. Stable geometric parameters of the lithography (5% deviation) in combination with a homogeneous heterostructure resulted in the robust and reproducible quantum dot formation for 37 out of 39 tested devices. |
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Bibliography: | Bureau International des Poids et Mesures MET-101293.R2 |
ISSN: | 0026-1394 1681-7575 |
DOI: | 10.1088/1681-7575/aaf4aa |