Micromachined Pyroelectric Probe for Non-Contact Thermal Diagnostic Systems

This paper describes a micro cantilever integrated with a pyroelectric infrared detector for non-contact scanning thermal microscopy (SThM). Pb(Zr,Ti)O3 (PZT) was deposited on the cantilever tip with a sol-gel method as a pyroelectric sensor. An X-ray diffraction (XRD) pattern of the deposited PZT f...

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Bibliographic Details
Published inJournal of Advanced Mechanical Design, Systems, and Manufacturing Vol. 7; no. 2; pp. 95 - 102
Main Authors SUITA, Kenji, HARA, Motoaki, ISHIKAWA, Shinya, TANAKA, Katsuhiro, NAGASAWA, Sumito, KUWANO, Hiroki
Format Journal Article
LanguageEnglish
Published The Japan Society of Mechanical Engineers 01.01.2013
Subjects
Cantilever
Deposition
Diagnostic systems
Infrared
Infrared detectors
Lead zirconate titanates
MEMS
Micromachining
Micromechanics
PZT
Sol-Gel
X-ray diffraction
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Summary:This paper describes a micro cantilever integrated with a pyroelectric infrared detector for non-contact scanning thermal microscopy (SThM). Pb(Zr,Ti)O3 (PZT) was deposited on the cantilever tip with a sol-gel method as a pyroelectric sensor. An X-ray diffraction (XRD) pattern of the deposited PZT film clearly indicated PZT (111) peak. A full width of half maximum intensity (FWHM) of 3.34° was achieved in the rocking curve of PZT (111) peak. The fabricated device was verified with a chopped infrared light. As a result, we succeeded to detect the switching of the thermal source with the cantilever experimentally.
Bibliography:ObjectType-Article-2
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ISSN:1881-3054
1881-3054
DOI:10.1299/jamdsm.7.95