Adsorption characteristics of organic long chain molecules during physical vapor deposition

• Published in: Applied surface science Vol. 193; no. 1; pp. 195 - 203
• Main Authors: Kubono, Atsushi, Yuasa, Norihiko, Shao, Hui-Li, Umemoto, Susumu, Okui, Norimasa
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 05.06.2002; Elsevier Science
• Subjects: Adsorption energy; Average lifetime; Chemisorption; Chemistry; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; General and physical chemistry; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Physics; Physisorption; Quartz crystal microbalance; Solid-gas interface; Surface physical chemistry; Vapor deposition; Vapor phase epitaxy; growth from vapor phase; Chemisorption; Vapor deposition; Adsorption energy; 68.10.Jy; 81.15.Ef; Quartz crystal microbalance; 82.65.Dp; 82.65.My; Physisorption; Average lifetime; Gold; Organic adsorbate; Polymerization; Thin film; Gas solid adsorption; Silver; Lifetime; Metastable state; Gas solid interface; Growth mechanism; Metallic adsorbent; Physical vapor deposition; Quartz microbalance
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/S0169-4332(02)00292-1

The adsorption processes in physical vapor deposition (PVD) and alternating vapor deposition polymerization (AVDP) of organic compounds are analyzed to estimate the parameters associated with the adsorption characteristics. Observation by a simple technique using a precisely tuned quartz crystal microbalance (QCM) reveals that the first stage in the thin film formation comprises two types of adsorption, namely physisorption and chemisorption. A modified model for physisorption involving free and metastable states is proposed for the analysis of the physisorption behavior in order to estimate the average lifetime and the adsorption energy of molecules on the substrate.