Mode-synthesizing atomic force microscopy for 3D reconstruction of embedded low-density dielectric nanostructures

Challenges in nanoscale characterization call for non-invasive, yet sensitive subsurface characterization of low-density materials such as polymers. In this work, we present new evidence that mode-synthesizing atomic force microscopy can be used to detect minute changes in low-density materials, suc...

Full description

Saved in:
Bibliographic Details
Published inNano research Vol. 8; no. 7; pp. 2199 - 2205
Main Authors Vitry, Pauline, Bourillot, Eric, Plassard, Cédric, Lacroute, Yvon, Calkins, Eric, Tetard, Laurene, Lesniewska, Eric
Format Journal Article
LanguageEnglish
Published Beijing Tsinghua University Press 01.07.2015
Springer Nature B.V
Subjects
acoustic
Atomic force microscopy
Atomic/Molecular Structure and Spectra
Biology
Biomedicine
Biotechnology
Calibration
Chemistry and Materials Science
Condensed Matter Physics
dielectic
Electron beam lithography
Electrons
Exposure
force
imaging
Materials Science
Microscopy
microscopy,3D
na_noscale
nanoscale
Nanostructure
Nanotechnology
Polymers
Reconstruction
Research Article
Silicon nitride
Spectrum analysis
subsurface
Three dimensional
tomic
Tomography
United States > US
acoustic microscopy
nanoscale tomography
3D reconstruction
atomic force microscopy
dielectric
nanoscale subsurface imaging
Online AccessGet full text

Cover

More Information
Summary:Challenges in nanoscale characterization call for non-invasive, yet sensitive subsurface characterization of low-density materials such as polymers. In this work, we present new evidence that mode-synthesizing atomic force microscopy can be used to detect minute changes in low-density materials, such as those engendered in electro-sensitive polymers during electron beam lithography, surpassing all common nanoscale mechanical techniques. Moreover, we propose 3D reconstruction of the exposed polymer regions using successive high-resolution frames acquired at incremental depths inside the sample. In addition, the results clearly show the influence of increasing dwell time on the depth profile of the nano-sized exposed regions. Hence, the simple approach described here can be used for achieving sensitive nanoscale tomography of soft materials with promising applications in material sciences and biology.
Bibliography:11-5974/O4
ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ISSN:1998-0124
1998-0000
DOI:10.1007/s12274-015-0728-8