Attenuation of disturbances introduced by dynamic links in precision motion systems using model-based observers

This paper presents an extension to the Unknown Input Disturbance Observer (UIDO) and the Disturbance Estimation Filter (DEF). This extension enables the inclusion of the mechanics of dynamic links to the observer model, in order to attenuate the specific disturbances introduced by those dynamic lin...

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Bibliographic Details
Published inMechatronics (Oxford) Vol. 24; no. 6; pp. 640 - 647
Main Authors Hoogerkamp, M., Waiboer, R.R., van Dijk, J., Aarts, R.G.K.M.
Format Journal Article
LanguageEnglish
Published Elsevier Ltd 01.09.2014
Subjects
Cable schlepp
Disturbance observer
Experimental validation
Internal model control
Kalman filter
Wafer stage
Disturbance observer
Experimental validation
Internal model control
Wafer stage
Kalman filter
Cable schlepp
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Summary:This paper presents an extension to the Unknown Input Disturbance Observer (UIDO) and the Disturbance Estimation Filter (DEF). This extension enables the inclusion of the mechanics of dynamic links to the observer model, in order to attenuate the specific disturbances introduced by those dynamic links. A design method of the state space feedback gain based on the dynamics, and an observer gain based on basic Kalman filter theory is given. It is shown how the observer is designed for a practical example; the cable schlepp within the wafer stage of a lithography machine. Using a simple model of the cable schlepp the disturbance observer design has been validated with an experiment on an actual machine.
ISSN:0957-4158
1873-4006
DOI:10.1016/j.mechatronics.2014.04.006