Fluorocarbon Resist for High-Speed Scanning Probe Lithography

Quick as a flash: High‐speed scanning probe lithography in perfluorooctane leads to direct deposition of fluorinated amorphous carbon at velocities in the cm s−1 range. Features as small as 27 nm are fabricated on 100‐μm2 areas within seconds. The nanoscale patterns are characterized by using photoe...

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Published inAngewandte Chemie (International ed.) Vol. 46; no. 39; pp. 7477 - 7480
Main Authors Rolandi, Marco, Suez, Itai, Scholl, Andreas, Fréchet, Jean M.J
Format Journal Article
LanguageEnglish
Published Weinheim Wiley-VCH Verlag 01.01.2007
WILEY-VCH Verlag
WILEY‐VCH Verlag
Subjects
electron microscopy
mass spectrometry
nanostructures
scanning probe lithography
surface chemistry
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Summary:Quick as a flash: High‐speed scanning probe lithography in perfluorooctane leads to direct deposition of fluorinated amorphous carbon at velocities in the cm s−1 range. Features as small as 27 nm are fabricated on 100‐μm2 areas within seconds. The nanoscale patterns are characterized by using photoelectron emission microscopy and secondary ion mass spectrometry.
Bibliography:http://dx.doi.org/10.1002/anie.200701496
Financial support from the Director, Office of Science, Office of Basic Energy Sciences, the U.S. Department of Energy under contract number DE-AC02-05CH11231, NSF-SINAM, and SRC-DARPA is gratefully acknowledged. M.R. thanks INTEL for postdoctoral funding through the Materials Sciences Division, LBNL. The authors thank Dr. T. Mates, D. Okawa, Dr. D. Mair, Dr. S. A. Backer, Dr. S. Rajaram, and Dr. A. Doran for assistance in characterization experiments and insightful discussions.
ark:/67375/WNG-QWPD2Q73-V
NSF-SINAM
SRC-DARPA
istex:870FC7049FB538E08772B175C04646EC0C0575D1
Director, Office of Science, Office of Basic Energy Sciences, the U.S. Department of Energy - No. DE-AC02-05CH11231
ArticleID:ANIE200701496
INTEL
Financial support from the Director, Office of Science, Office of Basic Energy Sciences, the U.S. Department of Energy under contract number DE‐AC02‐05CH11231, NSF‐SINAM, and SRC‐DARPA is gratefully acknowledged. M.R. thanks INTEL for postdoctoral funding through the Materials Sciences Division, LBNL. The authors thank Dr. T. Mates, D. Okawa, Dr. D. Mair, Dr. S. A. Backer, Dr. S. Rajaram, and Dr. A. Doran for assistance in characterization experiments and insightful discussions.
ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ISSN:1433-7851
1521-3773
DOI:10.1002/anie.200701496