Fluorocarbon Resist for High-Speed Scanning Probe Lithography
Quick as a flash: High‐speed scanning probe lithography in perfluorooctane leads to direct deposition of fluorinated amorphous carbon at velocities in the cm s−1 range. Features as small as 27 nm are fabricated on 100‐μm2 areas within seconds. The nanoscale patterns are characterized by using photoe...
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Published in | Angewandte Chemie (International ed.) Vol. 46; no. 39; pp. 7477 - 7480 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
Weinheim
Wiley-VCH Verlag
01.01.2007
WILEY-VCH Verlag WILEY‐VCH Verlag |
Subjects | |
Online Access | Get full text |
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Summary: | Quick as a flash: High‐speed scanning probe lithography in perfluorooctane leads to direct deposition of fluorinated amorphous carbon at velocities in the cm s−1 range. Features as small as 27 nm are fabricated on 100‐μm2 areas within seconds. The nanoscale patterns are characterized by using photoelectron emission microscopy and secondary ion mass spectrometry. |
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Bibliography: | http://dx.doi.org/10.1002/anie.200701496 Financial support from the Director, Office of Science, Office of Basic Energy Sciences, the U.S. Department of Energy under contract number DE-AC02-05CH11231, NSF-SINAM, and SRC-DARPA is gratefully acknowledged. M.R. thanks INTEL for postdoctoral funding through the Materials Sciences Division, LBNL. The authors thank Dr. T. Mates, D. Okawa, Dr. D. Mair, Dr. S. A. Backer, Dr. S. Rajaram, and Dr. A. Doran for assistance in characterization experiments and insightful discussions. ark:/67375/WNG-QWPD2Q73-V NSF-SINAM SRC-DARPA istex:870FC7049FB538E08772B175C04646EC0C0575D1 Director, Office of Science, Office of Basic Energy Sciences, the U.S. Department of Energy - No. DE-AC02-05CH11231 ArticleID:ANIE200701496 INTEL Financial support from the Director, Office of Science, Office of Basic Energy Sciences, the U.S. Department of Energy under contract number DE‐AC02‐05CH11231, NSF‐SINAM, and SRC‐DARPA is gratefully acknowledged. M.R. thanks INTEL for postdoctoral funding through the Materials Sciences Division, LBNL. The authors thank Dr. T. Mates, D. Okawa, Dr. D. Mair, Dr. S. A. Backer, Dr. S. Rajaram, and Dr. A. Doran for assistance in characterization experiments and insightful discussions. ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
ISSN: | 1433-7851 1521-3773 |
DOI: | 10.1002/anie.200701496 |