Design and Control of a Piezoelectric-Driven Microgripper Perceiving Displacement and Gripping Force

A piezoelectric-driven microgripper with three-stage amplification was designed, which is able to perceive the tip displacement and gripping force. The key structure parameters of the microgripper were determined by finite element optimization and its theoretical amplification ratio was derived. The...

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Published inMicromachines (Basel) Vol. 11; no. 2; p. 121
Main Authors Zhao, Yanru, Huang, Xiaojie, Liu, Yong, Wang, Geng, Hong, Kunpeng
Format Journal Article
LanguageEnglish
Published Switzerland MDPI 21.01.2020
MDPI AG
Subjects
gripping force
microassembly
microgripper
pid controller
tip displacement
PID controller
tip displacement
microassembly
gripping force
microgripper
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Abstract A piezoelectric-driven microgripper with three-stage amplification was designed, which is able to perceive the tip displacement and gripping force. The key structure parameters of the microgripper were determined by finite element optimization and its theoretical amplification ratio was derived. The tracking experiments of the tip displacement and gripping force were conducted with a PID controller. It is shown that the standard deviation of tracking error of the tip displacement is less than 0.2 μm and the gripping force is 0.35 mN under a closed-loop control. It would provide some references for realizing high-precision microassembly tasks with the designed microgripper which can control the displacement and gripping force accurately.
AbstractList A piezoelectric-driven microgripper with three-stage amplification was designed, which is able to perceive the tip displacement and gripping force. The key structure parameters of the microgripper were determined by finite element optimization and its theoretical amplification ratio was derived. The tracking experiments of the tip displacement and gripping force were conducted with a PID controller. It is shown that the standard deviation of tracking error of the tip displacement is less than 0.2 μm and the gripping force is 0.35 mN under a closed-loop control. It would provide some references for realizing high-precision microassembly tasks with the designed microgripper which can control the displacement and gripping force accurately.
Author Hong, Kunpeng
Liu, Yong
Huang, Xiaojie
Wang, Geng
Zhao, Yanru
AuthorAffiliation 2 Exquisite Automotive Systems Company Limited Exquisite Stamping and Welding Branch Company, Baoding 071000, China
1 The College of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454003, China; 211705010024@home.hpu.edu.cn (X.H.); wgmouse@163.com (G.W.); saveit@163.com (K.H.)
AuthorAffiliation_xml – name: 2 Exquisite Automotive Systems Company Limited Exquisite Stamping and Welding Branch Company, Baoding 071000, China
– name: 1 The College of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454003, China; 211705010024@home.hpu.edu.cn (X.H.); wgmouse@163.com (G.W.); saveit@163.com (K.H.)
Author_xml – sequence: 1
  givenname: Yanru
  surname: Zhao
  fullname: Zhao, Yanru
  organization: The College of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454003, China
– sequence: 2
  givenname: Xiaojie
  surname: Huang
  fullname: Huang, Xiaojie
  organization: The College of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454003, China
– sequence: 3
  givenname: Yong
  surname: Liu
  fullname: Liu, Yong
  organization: Exquisite Automotive Systems Company Limited Exquisite Stamping and Welding Branch Company, Baoding 071000, China
– sequence: 4
  givenname: Geng
  surname: Wang
  fullname: Wang, Geng
  organization: The College of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454003, China
– sequence: 5
  givenname: Kunpeng
  surname: Hong
  fullname: Hong, Kunpeng
  organization: The College of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454003, China
BackLink https://www.ncbi.nlm.nih.gov/pubmed/31973158$$D View this record in MEDLINE/PubMed
BookMark eNpVkU9v1DAQxS1UREvphQ-AckSVAv4XO7kgoV1aKhXRA0jcrFl7ElwldrCzK8Gnx9stpfXBM_J7-o3t95IchRiQkNeMvhOio-8nzxjllHH2jJxwqnmtlPpx9Kg_Jmc539KytO7K9oIcC9ZpwZr2hLg1Zj-ECoKrVjEsKY5V7Cuobjz-iTiiXZK39Tr5HYbqi7cpDsnPM6bqBpNFv_NhqNY-zyNYnDAsd6jLvWevXMRiekWe9zBmPLuvp-T7xadvq8_19dfLq9XH69pKKZe6lchkS8E63aimb4VshYKeUQkM25Z3tEPhqHMSNl0p3HLHW3DYQK-7op2SqwPXRbg1c_ITpN8mgjd3BzENBtLi7YimUZYJbcEpqiQK3EjsrKUAG1ZGYlNYHw6sebuZ0NnysgTjE-hTJfifZog7o6mWUu0Bb-8BKf7aYl7M5LPFcYSAcZsNF1JyrbkWxXp-sJbfzTlh_zCGUbNP2fxPuZjfPL7Yg_VfpuIvH8WmFA
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Cites_doi 10.3788/OPE.20152304.1096
10.1063/1.4891695
10.1016/j.sna.2012.12.034
10.1109/JMEMS.2013.2268849
10.1109/TRO.2009.2034831
10.1109/TASE.2011.2173570
10.1088/0964-1726/22/7/075036
10.1177/0954406213479513
10.1016/j.sna.2014.02.028
10.1088/0960-1317/20/1/015001
10.1002/adfm.201100482
10.1063/1.4918621
10.3788/OPE.20152305.1372
10.3788/OPE.20122007.1500
ContentType Journal Article
Copyright 2020 by the authors. 2020
Copyright_xml – notice: 2020 by the authors. 2020
DBID NPM
AAYXX
CITATION
7X8
5PM
DOA
DOI 10.3390/mi11020121
DatabaseName PubMed
CrossRef
MEDLINE - Academic
PubMed Central (Full Participant titles)
Directory of Open Access Journals
DatabaseTitle PubMed
CrossRef
MEDLINE - Academic
DatabaseTitleList
PubMed

CrossRef
Database_xml – sequence: 1
  dbid: DOA
  name: DOAJ Directory of Open Access Journals
  url: https://www.doaj.org/
  sourceTypes: Open Website
– sequence: 2
  dbid: NPM
  name: PubMed
  url: https://proxy.k.utb.cz/login?url=http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed
  sourceTypes: Index Database
DeliveryMethod fulltext_linktorsrc
Discipline Engineering
EISSN 2072-666X
ExternalDocumentID oai_doaj_org_article_56c137cad6064e3eb4e9cc0aab16afe5
10_3390_mi11020121
31973158
Genre Journal Article
GrantInformation_xml – fundername: Key Research Project in Colleges and Universities of Henan Province
  grantid: 17A460016
– fundername: National Natural Science Foundation of China
  grantid: 51505133
– fundername: Science and Technique Plan Project of Henan Technology Department
  grantid: 162102310431
GroupedDBID 53G
5VS
8FE
8FG
AADQD
AAFWJ
ABJCF
ADBBV
AENEX
AFKRA
AFPKN
AFZYC
ALMA_UNASSIGNED_HOLDINGS
AOIJS
BCNDV
BENPR
BGLVJ
CCPQU
GROUPED_DOAJ
HCIFZ
HYE
KQ8
L6V
M7S
MM.
MODMG
M~E
NPM
OK1
PGMZT
PIMPY
PROAC
PTHSS
RPM
TR2
TUS
AAYXX
CITATION
7X8
5PM
ID FETCH-LOGICAL-c444t-84e1480acd7565f834836af104a1e882909e3d0dd4ab90dd2c2d28ade5af799e3
IEDL.DBID RPM
ISSN 2072-666X
IngestDate Tue Oct 22 14:59:11 EDT 2024
Tue Sep 17 21:16:59 EDT 2024
Sat Aug 17 03:15:10 EDT 2024
Fri Aug 23 04:56:18 EDT 2024
Sat Sep 28 08:30:04 EDT 2024
IsDoiOpenAccess true
IsOpenAccess true
IsPeerReviewed true
IsScholarly true
Issue 2
Keywords PID controller
tip displacement
microassembly
gripping force
microgripper
Language English
License Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
LinkModel DirectLink
MergedId FETCHMERGED-LOGICAL-c444t-84e1480acd7565f834836af104a1e882909e3d0dd4ab90dd2c2d28ade5af799e3
Notes ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
OpenAccessLink https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7074465/
PMID 31973158
PQID 2344277273
PQPubID 23479
ParticipantIDs doaj_primary_oai_doaj_org_article_56c137cad6064e3eb4e9cc0aab16afe5
pubmedcentral_primary_oai_pubmedcentral_nih_gov_7074465
proquest_miscellaneous_2344277273
crossref_primary_10_3390_mi11020121
pubmed_primary_31973158
PublicationCentury 2000
PublicationDate 20200121
PublicationDateYYYYMMDD 2020-01-21
PublicationDate_xml – month: 1
  year: 2020
  text: 20200121
  day: 21
PublicationDecade 2020
PublicationPlace Switzerland
PublicationPlace_xml – name: Switzerland
PublicationTitle Micromachines (Basel)
PublicationTitleAlternate Micromachines (Basel)
PublicationYear 2020
Publisher MDPI
MDPI AG
Publisher_xml – name: MDPI
– name: MDPI AG
References Moussa (ref_11) 2013; 22
Wang (ref_6) 2016; 21
Das (ref_3) 2011; 9
Li (ref_18) 2012; 17
Wang (ref_1) 2013; 18
Hu (ref_2) 2015; 23
Alogla (ref_4) 2013; 202
Zhang (ref_8) 2010; 26
Barazandeh (ref_14) 2013; 227
Boudaoud (ref_7) 2013; 18
Ran (ref_9) 2012; 20
Hu (ref_12) 2012; 83
Yang (ref_21) 2015; 37
Cui (ref_20) 2015; 23
Xiao (ref_19) 2014; 23
Kuo (ref_10) 2014; 211
Randhawa (ref_15) 2011; 21
Jayaram (ref_13) 2010; 20
Liang (ref_5) 2015; 86
Rong (ref_16) 2014; 85
Wang (ref_17) 2015; 20
References_xml – volume: 23
  start-page: 1096
  year: 2015
  ident: ref_2
  article-title: Multi-objective optimization of micro-manipulation stage based on response surface method
  publication-title: Opt. Precis Eng.
  doi: 10.3788/OPE.20152304.1096
  contributor:
    fullname: Hu
– volume: 85
  start-page: 085002
  year: 2014
  ident: ref_16
  article-title: A vacuum microgripping tool with integrated vibration releasing capability
  publication-title: Rev. Sci. Instrum.
  doi: 10.1063/1.4891695
  contributor:
    fullname: Rong
– volume: 202
  start-page: 135
  year: 2013
  ident: ref_4
  article-title: A scalable syringe-actuated microgripper for biological manipulation
  publication-title: Sens. Actuat. A Phys.
  doi: 10.1016/j.sna.2012.12.034
  contributor:
    fullname: Alogla
– volume: 23
  start-page: 181
  year: 2014
  ident: ref_19
  article-title: Visual servo feedback control of a novel large working range micro manipulation system for microassembly
  publication-title: J. Microelectromech Syst.
  doi: 10.1109/JMEMS.2013.2268849
  contributor:
    fullname: Xiao
– volume: 37
  start-page: 655
  year: 2015
  ident: ref_21
  article-title: A bridge-type piezoelectric microgripper with integrated position/force sensors
  publication-title: Robot
  contributor:
    fullname: Yang
– volume: 83
  start-page: 463
  year: 2012
  ident: ref_12
  article-title: A novel driving principle by means of the parasitic motion of the microgripper and its preliminary application in the design of the linear actuator
  publication-title: Rev. Sci. Instrum.
  contributor:
    fullname: Hu
– volume: 26
  start-page: 200
  year: 2010
  ident: ref_8
  article-title: Autonomous robotic pick-and-place of microobjects
  publication-title: IEEE Trans. Robot.
  doi: 10.1109/TRO.2009.2034831
  contributor:
    fullname: Zhang
– volume: 9
  start-page: 160
  year: 2011
  ident: ref_3
  article-title: A multiscale assembly and packaging system for manufacturing of complex micro-nano devices
  publication-title: IEEE Trans. Autom. Sci. Eng.
  doi: 10.1109/TASE.2011.2173570
  contributor:
    fullname: Das
– volume: 22
  start-page: 075036
  year: 2013
  ident: ref_11
  article-title: Optimal observability-based modelling, design and characterization of piezoelectric microactuators
  publication-title: Smart Mater. Struct.
  doi: 10.1088/0964-1726/22/7/075036
  contributor:
    fullname: Moussa
– volume: 18
  start-page: 138
  year: 2013
  ident: ref_1
  article-title: A monolithic compliant piezoelectric-driven microgripper: Design, modeling, and testing
  publication-title: Microelectron. Eng.
  contributor:
    fullname: Wang
– volume: 227
  start-page: 2886
  year: 2013
  ident: ref_14
  article-title: Design and microfabrication of a compliant microgripper using nonbrittle and biocompatible material
  publication-title: J Mechan. Eng. Sci.
  doi: 10.1177/0954406213479513
  contributor:
    fullname: Barazandeh
– volume: 20
  start-page: 2205
  year: 2015
  ident: ref_17
  article-title: Design of a piezoelectric-actuated microgripper with a three-stage flexure-based amplification
  publication-title: Microelectron. Eng.
  contributor:
    fullname: Wang
– volume: 17
  start-page: 1120
  year: 2012
  ident: ref_18
  article-title: Design and robust repetitive control of a new parallel-kinematic XY piezostage for micro/nanomanipulation
  publication-title: Microelectron. Eng.
  contributor:
    fullname: Li
– volume: 211
  start-page: 121
  year: 2014
  ident: ref_10
  article-title: A hydrogel-based intravascular microgripper manipulated using magnetic fields
  publication-title: Sens. Actuat. A Phys.
  doi: 10.1016/j.sna.2014.02.028
  contributor:
    fullname: Kuo
– volume: 21
  start-page: 1262
  year: 2016
  ident: ref_6
  article-title: Design and control of a compliant microgripper with a large amplification ratio for high-speed micro manipulation
  publication-title: Microelectron. Eng.
  contributor:
    fullname: Wang
– volume: 20
  start-page: 548
  year: 2010
  ident: ref_13
  article-title: Development of a flexure-based, force-sensing microgripper for micro-object manipulation
  publication-title: J. Micromech. Microeng.
  doi: 10.1088/0960-1317/20/1/015001
  contributor:
    fullname: Jayaram
– volume: 18
  start-page: 1130
  year: 2013
  ident: ref_7
  article-title: Modeling and optimal force control of a nonlinear electrostatic microgripper
  publication-title: Microelectron. Eng.
  contributor:
    fullname: Boudaoud
– volume: 21
  start-page: 2395
  year: 2011
  ident: ref_15
  article-title: Microchemomechanical Systems
  publication-title: Adv. Funct. Mater.
  doi: 10.1002/adfm.201100482
  contributor:
    fullname: Randhawa
– volume: 86
  start-page: 85
  year: 2015
  ident: ref_5
  article-title: A novel monolithic piezoelectric actuated flexure-mechanism based wire clamp for microelectronic device packaging
  publication-title: Rev. Sci. Instrum.
  doi: 10.1063/1.4918621
  contributor:
    fullname: Liang
– volume: 23
  start-page: 1372
  year: 2015
  ident: ref_20
  article-title: Detection of finger displacement and gripping force of piezoelectric micro-gripper
  publication-title: Opt. Precis. Eng.
  doi: 10.3788/OPE.20152305.1372
  contributor:
    fullname: Cui
– volume: 20
  start-page: 1500
  year: 2012
  ident: ref_9
  article-title: SU-8 chevron electrothermal micro-actuator with three-layer structures
  publication-title: Opt. Precis. Eng.
  doi: 10.3788/OPE.20122007.1500
  contributor:
    fullname: Ran
SSID ssj0000779007
Score 2.3210747
Snippet A piezoelectric-driven microgripper with three-stage amplification was designed, which is able to perceive the tip displacement and gripping force. The key...
SourceID doaj
pubmedcentral
proquest
crossref
pubmed
SourceType Open Website
Open Access Repository
Aggregation Database
Index Database
StartPage 121
SubjectTerms gripping force
microassembly
microgripper
pid controller
tip displacement
SummonAdditionalLinks – databaseName: Directory of Open Access Journals
  dbid: DOA
  link: http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwrV1Lb9QwELbQnsoB0ZZHgFZGcI2axJM4PpZul6pSUQ9U6i3yc8mBpNrHhV_PjL3b7iIkLpwixZZjfeOM57PHnxn7rKWqg3Ayd1Wrc6gLkZuGTiy30nj8wcApOih88625uoPr-_p-56ovyglL8sAJuLO6saWQVjuMtMELb8ArawutTdno4JN6aaF2yFT0wSSjV8ikRyqQ15_97HGiq0jBbG8GikL9f4su_0yS3Jl1Zi_Zi024yM9TNw_ZMz8csec7IoLHzE1jEgbXg-MXKfGcj4Frftv7X2O65qa3-XRBfo3fUALeHD3Fg1_wW8pq6WlJgU_7ZUzPosXC2NTXRZRumPPZiJVesbvZ5feLq3xzd0JuAWCVt-CR6BTaOokhW2gFtALxQvKlS9_S7qnywhXOgTYKH5WtyFrO1zpIhWWv2WQYB_-WcaQ0oKD02gQHxgYVAiIajKtbBcgfM_Zpi2f3kCQyOqQWhHr3hHrGvhDUjzVI1jq-QGN3G2N3_zJ2xj5uDYVNL2lvQw9-XC-7SgBUkoKxjL1Jhnv8FHoZKcq6zZjcM-leX_ZLhv5HlNqWGGFBU7_7H51_zw4qIutFmVflBzZZLdb-BCOalTmNg_c3IlL4Sw
  priority: 102
  providerName: Directory of Open Access Journals
Title Design and Control of a Piezoelectric-Driven Microgripper Perceiving Displacement and Gripping Force
URI https://www.ncbi.nlm.nih.gov/pubmed/31973158
https://search.proquest.com/docview/2344277273
https://pubmed.ncbi.nlm.nih.gov/PMC7074465
https://doaj.org/article/56c137cad6064e3eb4e9cc0aab16afe5
Volume 11
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV3Pa9swFH40HYzuMLrfXregsV3d2JZs2cc2aVoGKWGs0JvRz9Sw2MFJL_3r-yTHXTJ62slgy7LQe9Z7n_TpE8APwYvUUs1DneQiZGlEQ5m5Hcs5lwZ_MKYLt1F4dp1d3bCft-ntAaT9XhhP2leyOq3_LE_r6s5zK1dLNep5YqP5bMwx7rEsHQ1ggA66A9H98OsU9CLeSZFShPSjZYUxLnHiZUfwEl2O09id8L4Th7xc_3M55r9UyZ3YMz2G19ukkZx1jXsDB6Z-C692pATfgZ54KgYRtSbjjn5OGksEmVfmoekOu6lUOGnd6EZmjoa3wPFiZVoyd9yWyk0skEm19iQtN2Xoq7psvYDDgkwbLPQebqYXv8dX4fYEhVAxxjZhzgzCnUgozTFxszllOc2ERQgmYpO7NdTCUB1pzYQs8JKoxNlMm1RYXuCzD3BYN7X5BASBDStYbIS0mkllC2uxc63UaV4wRJEBfO_7s1x1QhklAgxngPKvAQI4d139VMKJW_sbTbsotyYu00zFlCuhEVwxQ41kplAqEkLG2HiTBvCtNxRWvXYrHKI2zf26TChjCXcpWQAfO8M9fao3fAB8z6R7bdl_gv7nBbe3_vb5v988gaPE4fQoDpP4Cxxu2nvzFZOZjRzCIJ9eDuHF-cX1_NfQTwkMvUM_AsI8-rw
link.rule.ids 230,315,730,783,787,867,888,2109,27936,27937,33386,33757,53804,53806
linkProvider National Library of Medicine
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1Lj9MwEB4tiwTLAfEmPI3gmm0SO3F8hJZSYLvqYVfaW-RniUSTKu1e-PWMnWZpESdOkRLHsTwTz3z2588AHyQXuaOGxyYrZczyhMaq8DuWS64s_mDMCL9ReH5ezC7Zt6v86gjyYS9MIO1rVZ82P1enTf0jcCvXKz0aeGKjxXzMMe6xIh_dgttYXcL2QHoYgL2GXsJ7MVKKoH60qjHKZV6-7ATuoNNxmvoz3vciURDs_1eW-TdZci_6TB_A_V3aSD72zXsIR7Z5BPf2xAQfg5kEMgaRjSHjnoBOWkckWdT2V9sfd1PreNL58Y3MPRFviSPG2nZk4dkttZ9aIJN6E2haftIwVPWlCxIOSzJtsdATuJx-vhjP4t0ZCrFmjG3jklkEPInUhmPq5krKSlpIhyBMprb0q6jCUpMYw6QSeMl05q1mbC4dF_jsKRw3bWOfA0FowwRLrVTOMKWdcA471ymTl4Ihjozg_dCf1bqXyqgQYngDVH8MEMEn39U3Jby8dbjRdstqZ-QqL3RKuZYG4RWz1CpmhdaJlCrFxts8gneDobDqjV_jkI1trzdVRhnLuE_KInjWG-7mU4PhI-AHJj1oy-ET9MAgub3zuBf__eZbuDu7mJ9VZ1_Pv7-Ek8yj9iSNs_QVHG-7a_saU5utehMc-Td2Xvqd
linkToPdf http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1Lj9MwEB7BIq2WA-K5hKcRXLN52InjI7SU5dFVD6y0t8jPEokmVdq98OsZO-2SIk6cIiWOY3km9nz2528A3kkuCkcNj01eyZgVKY1V6U8sV1xZ_MGYEf6g8PyiPL9kX66Kq1Gqr0Da16o5a3-uztrmR-BWrlc62fPEksV8wnHeY2WRrI1LbsMdrDItR0A9DMJeRy_lgyApRWCfrBqc6XIvYXYCx-h4nGY-z_toNgqi_f-KNP8mTI5moNl9uLcLHcn7oYkP4JZtH8LdkaDgIzDTQMggsjVkMpDQSeeIJIvG_uqGlDeNjqe9H-PI3JPxljhqrG1PFp7h0vjlBTJtNoGq5RcOQ1Wf-iDjsCSzDgs9hsvZx--T83iXRyHWjLFtXDGLoCeV2nAM31xFWUVL6RCIycxWfidVWGpSY5hUAi-5zr3ljC2k4wKfPYGjtmvtUyAIb5hgmZXKGaa0E85h5zplikowxJIRvN33Z70e5DJqhBneAPUfA0TwwXf1TQkvcR1udP2y3hm6LkqdUa6lQYjFLLWKWaF1KqXKsPG2iODN3lBY9cbvc8jWdtebOqeM5dwHZhGcDoa7-dTe8BHwA5MetOXwCXphkN3eed2z_37zNRwvprP62-eLr8_hJPfAPc3iPHsBR9v-2r7E6GarXgU__g0FmPuw
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Design+and+Control+of+a+Piezoelectric-Driven+Microgripper+Perceiving+Displacement+and+Gripping+Force&rft.jtitle=Micromachines+%28Basel%29&rft.au=Yanru+Zhao&rft.au=Xiaojie+Huang&rft.au=Yong+Liu&rft.au=Geng+Wang&rft.date=2020-01-21&rft.pub=MDPI+AG&rft.eissn=2072-666X&rft.volume=11&rft.issue=2&rft.spage=121&rft_id=info:doi/10.3390%2Fmi11020121&rft.externalDBID=DOA&rft.externalDocID=oai_doaj_org_article_56c137cad6064e3eb4e9cc0aab16afe5
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=2072-666X&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=2072-666X&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=2072-666X&client=summon