Cr Sc multilayer radiator for parametric EUV radiation in "water-window" spectral range
The results of experimental investigation of parametric radiation generated by 5.7 MeV electrons in a multilayer structure consisting of 100 Cr Sc bi-layers deposited on a Si3N4 membrane are presented. The multilayer structure was specially created for generation of parametric radiation with photon...
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Published in | Journal of physics. Conference series Vol. 732; no. 1; pp. 12017 - 12023 |
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Main Authors | , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Bristol
IOP Publishing
01.07.2016
IOP Science |
Subjects | |
Online Access | Get full text |
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Summary: | The results of experimental investigation of parametric radiation generated by 5.7 MeV electrons in a multilayer structure consisting of 100 Cr Sc bi-layers deposited on a Si3N4 membrane are presented. The multilayer structure was specially created for generation of parametric radiation with photon energy in "water-window" spectral range. First test measurements of angular distributions of radiation have been done and discussed. |
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ISSN: | 1742-6588 1742-6596 1742-6596 1742-6588 |
DOI: | 10.1088/1742-6596/732/1/012017 |