Alternate extraction and acceleration of positive and negative ions from a gridded plasma source

By applying a square-wave voltage with frequencies between 10 kHz to 1 MHz to a set of grids terminating an ion-ion plasma source, we experimentally demonstrate the alternate extraction and acceleration of high energy (hundreds of eV) positive and negative ion beams. In addition, the ratio of positi...

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Bibliographic Details
Published inPlasma sources science & technology Vol. 24; no. 1; pp. 15005 - 8
Main Authors Lafleur, T, Rafalskyi, D, Aanesland, A
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.02.2015
Subjects
Acceleration
Adjustment
Electric potential
electric propulsion
etching
Extraction
Ion beams
ion-ion plasma
negative ion source
PEGASES
Physics
Plasma Physics
Stalling
Stopping
Voltage
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Summary:By applying a square-wave voltage with frequencies between 10 kHz to 1 MHz to a set of grids terminating an ion-ion plasma source, we experimentally demonstrate the alternate extraction and acceleration of high energy (hundreds of eV) positive and negative ion beams. In addition, the ratio of positive-to-negative ion beam current can be controlled by adjusting the applied square-wave duty cycle. Temporally resolved floating potential measurements of a target show that the downstream potential can be controlled and sufficiently reduced at high applied frequencies (∼200 kHz), indicating that space-charge compensation can be achieved to prevent beam stalling.
Bibliography:PSST-100382
ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/24/1/015005