Comparison between optical techniques and confocal microscopy for defect detection on thin wires

• Published in: Applied surface science Vol. 238; no. 1-4; pp. 375 - 379
• Main Authors: Siegmann, Philip, Sanchez-Brea, Luis Miguel, Martinez-Anton, Juan Carlos, Bernabeu, Eusebio
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 15.11.2004; Elsevier Science
• Subjects: Composition; defects and impurities; Condensed matter: structure, mechanical and thermal properties; Exact sciences and technology; Metallic surfaces; Physics; Solid surfaces and solid-solid interfaces; Surface defects; Surface structures; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Wires; Metallic surfaces; 68.37.Hk; 68.37.Ps; 81.20.Hy; Wires; Surface defects; 68.37.d; Surface structures; Surface defect; 81.20.Hy Wires; Confocal microscopy; Wire; Defect detection; Surface structure
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/j.apsusc.2004.05.240

Conventional microscopy techniques, such as atomic force microscopy (AFM), scanning electron microscopy (SEM), and confocal microscopy (CM) are not suitable for on-line surface inspection of fine metallic wires. In the recent years, some optical techniques have been developed to be used for those tasks. However, they need a rigorous validation. In this work, we have used confocal microscopy to obtain the topography z(x,y) of wires with longitudinal defects, such as dielines. The topography has been used to predict the light scattered by the wire. These simulations have been compared with experimental results, showing a good agreement.