Use of Self-Calibration Data for Multifunctional MEMS Sensor Prognostics

This paper proposes a solution to monitor the degradation of a multifunctional microelectromechanical systems (MEMS) sensor (MFS) and to recalibrate the sensor output accordingly. The solution is able to predict the remaining useful life based on the recalibration history. The MFS used is a dual pre...

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Bibliographic Details
Published inJournal of microelectromechanical systems Vol. 25; no. 4; pp. 761 - 769
Main Authors Khan, Haroon Ahmed, Tahir, Imran, Richardson, Andrew
Format Journal Article
LanguageEnglish
Published New York IEEE 01.08.2016
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Bridge circuits
Degradation
Diagnosis
diagnostics
Doping
fault tolerance
Humidity
HUMS
Mathematical models
Microelectromechanical systems
Microelectromechanical systems (MEMS)
Monitors
Piezoresistance
Piezoresistive devices
Polymers
pressure
Prognosis
prognostics
reconfiguration
self-test
Sensors
Stress
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Summary:This paper proposes a solution to monitor the degradation of a multifunctional microelectromechanical systems (MEMS) sensor (MFS) and to recalibrate the sensor output accordingly. The solution is able to predict the remaining useful life based on the recalibration history. The MFS used is a dual pressure-humidity hybrid sensor where model data have been used to demonstrate the applicability and performance of the proposed method for diagnosis, self-correction, and prognosis.
Bibliography:ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2016.2564499