Low-Cost, High-Performance Fiber Optic Fabry–Perot Sensor for Ultrasonic Wave Detection

• Published in: Sensors (Basel, Switzerland) Vol. 19; no. 2; p. 406
• Main Authors: Li, Haoyong, Li, Delin, Xiong, Chaoyu, Si, Wenrong, Fu, Chenzhao, Yuan, Peng, Yu, Yiting
• Format: Journal Article
• Language: English
• Published: Switzerland MDPI 19.01.2019; MDPI AG
• Subjects: Fabry–Perot; fiber optic sensors; ultrasonic pressure detection; ultrasonic pressure detection; Fabry–Perot; fiber optic sensors

This study describes a novel fiber optic extrinsic Fabry–Perot interferometric (EFPI) ultrasonic sensor comprising a low-cost and high-performance silicon diaphragm. A vibrating diaphragm, 5 μm thick, was fabricated by using the Microelectromechanical Systems (MEMS) processing technology on a silico...