Design and investigation of field plate-based vertical GAA – β-(AlGa)2O3/Ga2O3 high electron mobility transistor
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Published in | Micro and nanostructures (2022) Vol. 164; p. 107117 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
01.04.2022
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Online Access | Get full text |
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ISSN: | 2773-0123 2773-0123 |
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DOI: | 10.1016/j.spmi.2021.107117 |