Influence of oxygen atmosphere on crystallization and properties of LiNbO3 thin films

• Published in: Journal of the European Ceramic Society Vol. 24; no. 6; pp. 1607 - 1613
• Main Authors: SIMOES, A. Z, ZAGHETE, M. A, STOJANOVIC, B. D, GONZALEZ, A. H, RICCARDI, C. S, CANTONI, M, VARELA, J. A
• Format: Conference Proceeding Journal Article
• Language: English
• Published: Oxford Elsevier 2004
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Cross-disciplinary physics: materials science; rheology; Dielectric, piezoelectric, ferroelectric and antiferroelectric materials; Dielectrics, piezoelectrics, and ferroelectrics and their properties; Exact sciences and technology; Liquid phase epitaxy; deposition from liquid phases (melts, solutions, and surface layers on liquids); Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Niobates, titanates, tantalates, pzt ceramics, etc; Physics; Dissipation factor; Scanning electron microscopy; Inorganic compounds; Lithium Metaniobates; Electrical properties; Dielectric properties; Niobates; Controlled atmospheres; XRD; Experimental study; Ferroelectric properties; Fabrication property relation; Precursor; Oxidizing atmosphere; Transmission electron microscopy; Morphology; Crystal growth from solutions; Spin-on coating; Fabrication structure relation; Polymers; Thermal annealing; Permittivity; Hysteresis; Ferroelectric thin films
• ISSN: 0955-2219; 1873-619X
• DOI: 10.1016/s0955-2219(03)00453-9

Thin films of lithium niobate were deposited on Pt/Ti/SiO2 (111) substrates by spin coating using the polymeric precursor method (Pechini process). Annealing in static air and oxygen atmosphere was carried out at 500 C for 3 h. The films were characterised by XRD, SEM and TEM. The dielectric constant and dissipation factor were measured in the frequency region from 10 Hz to 10 MHz. Electrical characterisation of the films pointed to ferroelectricity via hysteresis loop. The effect of oxygen atmosphere on crystallisation, morphology and properties of LiNbO3 thin films is discussed. 18 refs.