Microstructure, mechanical and tribological properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering

• Published in: Surface & coatings technology Vol. 205; no. 8; pp. 3058 - 3065
• Main Authors: Wang, Yongjun, Li, Hongxuan, Ji, Li, Zhao, Fei, Kong, Qinghua, Wang, Yongxia, Liu, Xiaohong, Quan, Weilong, Zhou, Huidi, Chen, Jianmin
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 25.01.2011; Elsevier
• Subjects: Applied sciences; Bias; Bias voltage; Cross-disciplinary physics: materials science; rheology; Deposition; Electric potential; Exact sciences and technology; Graphite-like carbon film; Materials science; Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology; Metals. Metallurgy; Methods of deposition of films and coatings; film growth and epitaxy; Microstructure; Nanostructure; Physics; Production techniques; Resultants; Surface treatment; Surface treatments; Tribological properties; Tribology; Unbalanced magnetron sputtering; Voltage; Graphite-like carbon film; Tribological properties; Unbalanced magnetron sputtering; Microstructure; Bias voltage; Mechanical properties; Surface treatments; Amorphous state; Carbon; Sputtering; Thin films; Magnetrons; Physical vapor deposition; Tribology
• ISSN: 0257-8972; 1879-3347
• DOI: 10.1016/j.surfcoat.2010.11.019

Graphite-like amorphous carbon (GLC) films were fabricated by unbalanced magnetron sputtering on silicon and stainless steel substrates. The effects of deposition bias voltage on the microstructure, mechanical and tribological properties of the resultant films were investigated by means of X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, atomic force microscopy (AFM), high resolution transmission electron microscopy (HRTEM), nano-indentation and tribological experiments, respectively. The results show that the present films are dominated by sp 2 sites, and the microstructure and properties of the resultant films strongly depend upon the deposition bias voltage. Namely, the sp 3 content, hardness, elastic modulus and critical load monotonically increase with increasing deposition bias voltage from 50 to 150 V, and then they decrease with further increasing the bias voltage to 185 V, while internal stress decreases at first and then increases with further increasing of deposition bias voltage. The films deposited at different bias voltages have high surface roughness. Tribological properties of the films are closely related with the deposition bias voltage, 150 V is the optimum value for obtaining good wear resistance. ► The resultant films are dominated by sp 2 sites and the I D/I G is as high as 4.9. ► The deposited films have moderately high hardness and low internal stress. ► The present films demonstrate excellent tribological properties.