Powering MEMS portable devices—a review of non-regenerative and regenerative power supply systems with special emphasis on piezoelectric energy harvesting systems

• Published in: Smart materials and structures Vol. 17; no. 4; pp. 043001 - 043001 (33)
• Main Authors: Cook-Chennault, K A, Thambi, N, Sastry, A M
• Format: Journal Article
• Language: English
• Published: Bristol IOP Publishing 01.08.2008; Institute of Physics
• Subjects: Applied sciences; Exact sciences and technology; General equipment and techniques; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Micromechanical devices and systems; Physics; Precision engineering, watch making; Transducers; Energy consumption; Power supplies; Semiconductor materials; Piezoelectric transducers; Electric generators; Energy recovery; Portable equipment; Microelectromechanical device; Semiconductor technology
• ISSN: 0964-1726; 1361-665X
• DOI: 10.1088/0964-1726/17/4/043001

Power consumption is forecast by the International Technology Roadmap of Semiconductors (ITRS) to pose long-term technical challenges for the semiconductor industry. The purpose of this paper is threefold: (1) to provide an overview of strategies for powering MEMS via non-regenerative and regenerative power supplies; (2) to review the fundamentals of piezoelectric energy harvesting, along with recent advancements, and (3) to discuss future trends and applications for piezoelectric energy harvesting technology. The paper concludes with a discussion of research needs that are critical for the enhancement of piezoelectric energy harvesting devices.