Syntheses and mechanical properties of Ti–B–C coatings by a plasma-enhanced chemical vapor deposition

Ti–B–C coatings were synthesized on WC–Co and Si wafer substrates by PECVD technique using a gaseous mixture of TiCl 4, BCl 3, CH 4, Ar, and H 2. In this work, the boron content was varied in a wide range from TiC to TiB 2, and microstructure and mechanical properties of synthesized Ti–B–C coatings...

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Published inSurface & coatings technology Vol. 200; no. 5; pp. 1418 - 1423
Main Authors Ok, Jung-Tae, Park, In-Wook, Moore, John J., Kang, Myung Chang, Kim, Kwang Ho
Format Journal Article Conference Proceeding
LanguageEnglish
Published Lausanne Elsevier B.V 21.11.2005
Elsevier
Subjects
Applied sciences
Cross-disciplinary physics: materials science; rheology
Exact sciences and technology
Friction coefficient
Materials science
Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology
Metals. Metallurgy
Microhardness
Other topics in materials science
PECVD
Physics
Production techniques
Surface treatment
Ti–B–C coatings
Friction coefficient
Ti–B–C coatings
PECVD
Microhardness
Plasma
Mechanical properties
Coatings
Chemical vapor deposition
Surface treatment
Vapor deposition
Synthesis
Friction
Chemical deposition
Ti-B-C coatings
Tribology
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Summary:Ti–B–C coatings were synthesized on WC–Co and Si wafer substrates by PECVD technique using a gaseous mixture of TiCl 4, BCl 3, CH 4, Ar, and H 2. In this work, the boron content was varied in a wide range from TiC to TiB 2, and microstructure and mechanical properties of synthesized Ti–B–C coatings were systematically investigated. From our instrumental analyses, the synthesized Ti–B–C coatings was concluded to be composites consisting of nanocrystallites TiC, quasi-amorphous TiB 2, and amorphous carbon at low boron content, on the contrary, nanocrystallites TiB 2, quasi-amorphous TiC, and amorphous carbon at relatively high boron content. The microhardness of the Ti–B–C coatings increased from ∼ 23 GPa of TiC to ∼ 38 GPa of Ti 0.33B 0.55C 0.11 coatings with increasing the boron content. The Ti 0.33B 0.55C 0.11 coatings showed lower average friction coefficient of 0.45, in addition, it showed relatively better wear behavior compared to other binary coatings of TiB 2 and TiC.
Bibliography:SourceType-Scholarly Journals-2
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ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2005.08.078