Linear variable optical filter-based ultraviolet microspectrometer

An IC-compatible linear variable optical filter (LVOF) for application in the UV spectral range between 310 and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A s...

Full description

Saved in:
Bibliographic Details
Published inApplied optics. Optical technology and biomedical optics Vol. 51; no. 19; p. 4308
Main Authors Emadi, Arvin, Wu, Huaiwen, de Graaf, Ger, Enoksson, Peter, Correia, Jose Higino, Wolffenbuttel, Reinoud
Format Journal Article
LanguageEnglish
Published United States 01.07.2012
Subjects
Algorithms
Calibration
Computer Simulation
Computer-Aided Design
Equipment Design
Microspectrophotometry - instrumentation
Miniaturization
Models, Theoretical
Optical Devices
Ultraviolet Rays
Online AccessGet more information

Cover

More Information
Summary:An IC-compatible linear variable optical filter (LVOF) for application in the UV spectral range between 310 and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A special calibration technique has been employed that is based on an initial spectral measurement on a xenon lamp. The image recorded on the camera during calibration is used in a signal processing algorithm to reconstruct the spectrum of the mercury lamp and the calibration data is subsequently used in UV spectral measurements. Experiments on a fabricated LVOF-based microspectrometer with this calibration approach implemented reveal a spectral resolution of 0.5 nm.
ISSN:2155-3165
DOI:10.1364/AO.51.004308