A microcantilever chemical sensors optimization by taking into account losses

The current trend in increasing microcantilever resonant frequencies leads to relatively low quality factors for microcantilevers resonating in a gas medium. In order to increase the quality factor of such high-frequency microcantilevers, an approach that takes into account the different types of lo...

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Bibliographic Details
Published inSensors and actuators. B, Chemical Vol. 118; no. 1; pp. 292 - 296
Main Authors Lochon, Frédéric, Dufour, Isabelle, Rebière, Dominique
Format Journal Article
LanguageEnglish
Published Elsevier B.V 25.10.2006
Elsevier
Subjects
Actuators
Aspect ratio
Chemical sensor
Chemical sensors
Engineering Sciences
Losses
Micro and nanotechnologies
Microcantilever
Microelectronics
Optimization
Quality factor
Resonant frequencies
Sensors
Trends
Losses
Chemical sensor
Aspect ratio
Quality factor
Microcantilever
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Summary:The current trend in increasing microcantilever resonant frequencies leads to relatively low quality factors for microcantilevers resonating in a gas medium. In order to increase the quality factor of such high-frequency microcantilevers, an approach that takes into account the different types of losses is provided to specify appropriate values of microcantilever aspect ratios (length to thickness, width to thickness). Conventional values of aspect ratios result in low quality factors, while those proposed here lead to slightly higher values of quality factor.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2006.04.034