Photo-catalytic titanium oxide film deposition by atmospheric TPCVD using vortex Ar plasma jet

• Published in: Vacuum Vol. 110; pp. 190 - 195
• Main Authors: Ando, Yasutaka, Noda, Yoshimasa, Kobayashi, Akira
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 01.12.2014
• Subjects: Anatase; Deposition; Droplets; Fluid dynamics; Fluid flow; MOCVD; Nozzles; Photo-catalyst; Spray pyrolysis; Surface modification; Thermal plasma chemical vapor deposition (TPCVD); Titanium oxide; Titanium oxides; Vortex flow; Vortices; Surface modification; Spray pyrolysis; Thermal plasma chemical vapor deposition (TPCVD); Photo-catalyst; Vortex flow; Titanium oxide; MOCVD
• ISSN: 0042-207X; 1879-2715
• DOI: 10.1016/j.vacuum.2014.07.002

In order to generate the vortex plasma jet, the vortex flow creation nozzle (vortex nozzle) was equipped at the head of the plasma torch. Consequently, by equipment of the vortex nozzle, plasma jet released from the plasma torch ran along the inner wall of the vortex nozzle and the plasma jet was changed into vortex plasma jet in the vortex nozzle. As for the titanium oxide film deposition, anatase rich titanium oxide film with uniform thickness distribution could be obtained on the 304 stainless steel substrate. The film deposition rate at the center on the condition of 30 mm in deposition distance was approximately 8 μm/min. Besides, since the anatase rich film indicated hydrophilic and methylene-blue droplet on the film was decolored by UV irradiation in cases of methylene-blue wettability and decoloration tests, it was proved that the anatase rich film have photocatalytic properties. Especially, in case of the film deposited on the condition of 30 mm in deposition distance, methylene-blue droplet was perfectly decolored by 48 h UV irradiation. From these results, this technique was found to have high potential for uniform film deposition by TPCVD. •To obtain the radially uniform arc jet for TPCVD, vortex plasma jet was generated.•For the vortex plasma generation, a vortex plasma generation torch was developed.•Anatase rich TiO2 film with smooth thickness distribution could be deposited.•The film had enough photo-catalytic property to indicate hydrophilic.•The film had photo-catalytic property to decolor the methylene-blue droplet.