When epitaxy meets plasma: a path to ordered nanosheets arrays

The possibility of a controlled assembly of 2-dimensional (2D) nanosheets (NSs) into ordered arrays or even more sophisticated structures offers tremendous opportunities in the context of fabrication of a variety of NSs based devices. Reports of such ordered NSs are rare and all conventional “top-do...

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Bibliographic Details
Published inScientific reports Vol. 3; no. 1; p. 2427
Main Authors Zhuang, Hao, Zhang, Lei, Fuchs, Regina, Staedler, Thorsten, Jiang, Xin
Format Journal Article
LanguageEnglish
Published London Nature Publishing Group UK 13.08.2013
Nature Publishing Group
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