Influence of piezoceramic to fused silica plate thickness on the radii of curvature of piezoelectric bimorph mirror

• Published in: Review of scientific instruments Vol. 83; no. 1; p. 015001
• Main Authors: Libu, M, Susanth, S, Vasanthakumari, K G, Kumar, C J Dileep, Raghu, N
• Format: Journal Article
• Language: English
• Published: United States 01.01.2012
• ISSN: 1089-7623
• DOI: 10.1063/1.3673642

Piezoelectric based bimorph mirrors (PBM) find extensive use in focusing of x-ray beams. Many optical instruments require use of PBM whose radii of curvature can be tuned precisely. The 100 mm and 300 mm PBMs were fabricated with varying piezoelectric to fused silica plate thicknesses. The radii of curvature of free standing mirrors were measured as a function of voltage and it was found to decrease with increasing voltage. For a given piezoelectric plate thickness, as the fused silica thickness increases, the radii of curvature was found to increase owing to increase in stiffness of the mirror. On the other hand, for a given fused silica plate thickness, when the piezoelectric plate thickness is increased, the radii of curvature are decreased for a given electric field, due to increase in generated force. This study brings out the influence of piezoceramic to fused silica plate thickness on the radii of curvature of PBM.