The effect of seed layer on morphology of ZnO nanorod arrays grown by hydrothermal method

• Published in: Journal of alloys and compounds Vol. 489; no. 1; pp. 99 - 102
• Main Authors: Tao, Yinglei, Fu, Ming, Zhao, Ailun, He, Dawei, Wang, Yongsheng
• Format: Journal Article
• Language: English
• Published: Kidlington Elsevier B.V 07.01.2010; Elsevier
• Subjects: Arrays; Chemical synthesis methods; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Crystal growth; Deposition; Exact sciences and technology; Hydrothermal method; Magnetron sputtering; Materials science; Methods of nanofabrication; Morphology; Nanocomposites; Nanomaterials; Nanoscale materials: clusters, nanoparticles, nanotubes, and nanocrystals; Nanostructure; Physics; Seeds; Structure of solids and liquids; crystallography; Zinc oxide; ZnO; Crystal growth; ZnO; Magnetron sputtering; Hydrothermal method; Scanning electron microscopy; Annealing; Cathode sputtering; Partial pressure; Hydrothermal synthesis; Morphology; Zinc oxide; Microstructure; Arrays; Nanorod; Radiofrequency sputtering; Nanomaterial synthesis
• ISSN: 0925-8388; 1873-4669
• DOI: 10.1016/j.jallcom.2009.09.020

Well-aligned ZnO nanorod arrays were synthesized by hydrothermal method on Si substrates that were covered with pre-deposited ZnO films as seed layers. The ZnO seed layers were deposited by RF magnetron sputtering. It is found that the seed layers prepared under different oxygen partial pressure sputtering parameters and annealing treatment have a great influence on the morphology of the ZnO nanorod arrays grown subsequently on them. Furthermore, growth positions of nanorod/microrod arrays were selectively controlled on the lithography-assist ZnO seed layer.