Metal-organic chemical vapor deposition of Sr–Co–Fe–O films on porous substrates

Aerosol-assisted chemical vapor deposition using the β-diketonate precursors Sr(tmhd)2 · 2H2O, Fe(tmhd) 3, and Co(tmhd) 3 was investigated for depositing thin films of the mixed-conducting ceramic SrCoyFe1−yO3−δ onto porous α–Al2O3 substrates. Single-phase SrCoyFe1−yO3−δ perovskite films were obtain...

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Bibliographic Details
Published inJournal of materials research Vol. 13; no. 1; pp. 173 - 179
Main Authors Xia, Changfeng, Ward, Timothy L., Atanasova, Paolina, Schwartz, Robert W.
Format Journal Article
LanguageEnglish
Published New York, USA Cambridge University Press 01.01.1998
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Summary:Aerosol-assisted chemical vapor deposition using the β-diketonate precursors Sr(tmhd)2 · 2H2O, Fe(tmhd) 3, and Co(tmhd) 3 was investigated for depositing thin films of the mixed-conducting ceramic SrCoyFe1−yO3−δ onto porous α–Al2O3 substrates. Single-phase SrCoyFe1−yO3−δ perovskite films were obtained at a deposition temperature of 550 °C and pressure of 15 mm Hg, whereas deposition at atmospheric pressure produced mixed-phase films. The Co/Fe elemental ratios in the films reflected those in the precursor solution, but the films were depleted in Sr. Reduced-pressure deposition provided a more uniform film morphology than atmospheric pressure, and led to a supported film which was leak-tight to N2 flow.
Bibliography:ArticleID:04260
PII:S0884291400042606
ark:/67375/6GQ-BTW6QQFL-L
istex:8617AFBE5B94210B0E67EE2D56BFF39AE6B007C4
ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0884-2914
2044-5326
DOI:10.1557/JMR.1998.0023