Influence of Tip Temperature on Field Evaporation in Atom Probe

Recently, laser pulses on a three-dimensional atom probe have been used to trigger the field evaporation. The advantages of laser-pulse atom probes are high mass resolution and application to higher resistivity materials such as semiconductors. Most recent studies using laser pulses have indicated t...

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Bibliographic Details
Published inE-journal of surface science and nanotechnology Vol. 9; pp. 375 - 379
Main Authors Mayama, N., Terakawa, T., Morita, M., Owari, M.
Format Journal Article
LanguageEnglish
Published The Japan Society of Vacuum and Surface Science 01.01.2011
Subjects
Atom probe
Field-evaporation
Spatial resolution
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Summary:Recently, laser pulses on a three-dimensional atom probe have been used to trigger the field evaporation. The advantages of laser-pulse atom probes are high mass resolution and application to higher resistivity materials such as semiconductors. Most recent studies using laser pulses have indicated that the field evaporation of atoms occurred by a thermal pulsing mechanism. In this study, we analyzed the metal specimens, tungsten, nickel and aluminum, by using the hand-made 3DAP in our laboratory, and verified the mechanism of field evaporation by laser pulses. From the results, the spatial resolution might be extremely better at lower tip temperature. The difference of mass resolution between the laser-irradiated and shadow sides was observed and this might resulted from the difference of cooling duration in both sides. In the reconstruction calculation, the difference of curvature radii in the laser-irradiated and shadow sides was compensated and the spatial resolution was evaluated. [DOI: 10.1380/ejssnt.2011.375]
ISSN:1348-0391
1348-0391
DOI:10.1380/ejssnt.2011.375