High sensitivity Love-mode liquid density sensors
An experimental study into Love-mode liquid sensors using polyimide for a waveguide layer has been carried out. Love devices were built on Y-ST quartz with 40 μm wavelength inter-digitated transducers operating up to 124.7 MHz, and polyimide layers between 0.65 and 1.5 μm thick. The optimum polyimid...
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Published in | Sensors and actuators. A. Physical. Vol. 123; pp. 267 - 273 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
23.09.2005
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Abstract | An experimental study into Love-mode liquid sensors using polyimide for a waveguide layer has been carried out. Love devices were built on Y-ST quartz with 40
μm wavelength inter-digitated transducers operating up to 124.7
MHz, and polyimide layers between 0.65 and 1.5
μm thick. The optimum polyimide thickness was 0.85
μm exhibiting a minimum insertion loss of 16
dB. Surface corrugations from 2.5
μm wide and 0.5
μm deep were etched in the polyimide to discriminate the liquid density from the square root of the density–viscosity product. A maximum sensitivity of up to 0.36
μg
cm
−3
Hz
−1 has been obtained, a higher value than found in most other studies. |
---|---|
AbstractList | An experimental study into Love-mode liquid sensors using polyimide for a waveguide layer has been carried out. Love devices were built on Y-ST quartz with 40
μm wavelength inter-digitated transducers operating up to 124.7
MHz, and polyimide layers between 0.65 and 1.5
μm thick. The optimum polyimide thickness was 0.85
μm exhibiting a minimum insertion loss of 16
dB. Surface corrugations from 2.5
μm wide and 0.5
μm deep were etched in the polyimide to discriminate the liquid density from the square root of the density–viscosity product. A maximum sensitivity of up to 0.36
μg
cm
−3
Hz
−1 has been obtained, a higher value than found in most other studies. An experimental study into Love-mode liquid sensors using polyimide for a waveguide layer has been carried out. Love devices tvere built on Y -ST quartz with 40mu.m wavelength inter-digitated transducers operating up to 124.7 MHz, and polyimide layers between 0.65 aid 1.5 mm thick. The optimum polyimide thickness was 0.85 mm exhibiting a minimum insertion loss of 16 dB. Surface corrugations from 2.5 mm wide and 0.5 mm deep were etched in the polyimide to discriminate the liquid density from the square root of the density-viscosity product. A maximum sensitivity of up to 0.36 mg cm- 3 Hz-1 has been obtained, a higher value than found in most other studies. An experimental study into Love-mode liquid sensors using polyimide for a waveguide layer has been carried out. Love devices were built on Y-ST quartz with 40 km wavelength inter-digitated transducers operating up to 124.7 MHz, and polyimide layers between 0.65 and 1.5 km thick. The optimum polyimide thickness was 0.85 km exhibiting a minimum insertion loss of 16 dB. Surface corrugations from 2.5 km wide and 0.5 km deep were etched in the polyimide to discriminate the liquid density from the square root of the density-viscosity product. A maximum sensitivity of up to 0.36 kg cm super(-3) Hz super(-1) has been obtained, a higher value than found in most other studies. |
Author | Turton, A.C. Bhattacharyya, D. Wood, D. |
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Cites_doi | 10.1016/j.bios.2003.08.020 10.1016/S0924-4247(99)00224-1 10.1109/58.156185 10.1063/1.1499750 10.1088/0964-1726/6/6/008 10.1016/0924-4247(92)80205-H 10.1088/0964-1726/6/6/004 10.1016/S0924-4247(96)01311-8 10.1016/S0924-4247(98)00017-X 10.1063/1.111976 10.1088/0964-1726/6/6/003 10.1021/ac010859e 10.1063/1.107807 10.1016/j.sna.2003.10.034 10.1016/0250-6874(86)80034-8 10.1016/0924-4247(93)00660-V |
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Snippet | An experimental study into Love-mode liquid sensors using polyimide for a waveguide layer has been carried out. Love devices were built on Y-ST quartz with 40... An experimental study into Love-mode liquid sensors using polyimide for a waveguide layer has been carried out. Love devices tvere built on Y -ST quartz with... |
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SubjectTerms | Actuators Density Liquid density sensor Liquids Love Noise levels Optimization Polyimide Polyimide resins SAW Sensors Wavelengths |
Title | High sensitivity Love-mode liquid density sensors |
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