High sensitivity Love-mode liquid density sensors

An experimental study into Love-mode liquid sensors using polyimide for a waveguide layer has been carried out. Love devices were built on Y-ST quartz with 40 μm wavelength inter-digitated transducers operating up to 124.7 MHz, and polyimide layers between 0.65 and 1.5 μm thick. The optimum polyimid...

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Bibliographic Details
Published inSensors and actuators. A. Physical. Vol. 123; pp. 267 - 273
Main Authors Turton, A.C., Bhattacharyya, D., Wood, D.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 23.09.2005
Subjects
Actuators
Density
Liquid density sensor
Liquids
Love
Noise levels
Optimization
Polyimide
Polyimide resins
SAW
Sensors
Wavelengths
SAW
Polyimide
Liquid density sensor
Love
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Summary:An experimental study into Love-mode liquid sensors using polyimide for a waveguide layer has been carried out. Love devices were built on Y-ST quartz with 40 μm wavelength inter-digitated transducers operating up to 124.7 MHz, and polyimide layers between 0.65 and 1.5 μm thick. The optimum polyimide thickness was 0.85 μm exhibiting a minimum insertion loss of 16 dB. Surface corrugations from 2.5 μm wide and 0.5 μm deep were etched in the polyimide to discriminate the liquid density from the square root of the density–viscosity product. A maximum sensitivity of up to 0.36 μg cm −3 Hz −1 has been obtained, a higher value than found in most other studies.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2005.02.010