Picosecond pulsed laser for microscale sample preparation

Ultra short pulsed laser ablation is applied for preparing samples suitable for micromechanical testing. Laue microdiffraction shows that the micromachining hardly damages the initial microstructure. The technique has the potential to be a promising alternative to focused ion beam preparation for mi...

Full description

Saved in:
Bibliographic Details
Published inMaterials letters Vol. 160; pp. 589 - 591
Main Authors Guitton, A., Irastorza-Landa, A., Broennimann, R., Grolimund, D., Van Petegem, S., Van Swygenhoven, H.
Format Journal Article
LanguageEnglish
Published Elsevier 01.12.2015
Subjects
Chemical Sciences
Damage
Engineering Sciences
Implants
Ion beams
Laser ablation
Material chemistry
Micromachining
Microstructure
Pulsed lasers
Laser processing
Metals and alloys
X-ray techniques
Small scale mechanical testing
Defects
Online AccessGet full text

Cover

Abstract Ultra short pulsed laser ablation is applied for preparing samples suitable for micromechanical testing. Laue microdiffraction shows that the micromachining hardly damages the initial microstructure. The technique has the potential to be a promising alternative to focused ion beam preparation for micromechanical objects since it is relatively fast, efficient and implants no ions.
AbstractList Ultra short pulsed laser ablation is applied for preparing samples suitable for micromechanical testing. Laue microdiffraction shows that the micromachining hardly damages the initial microstructure. The technique has the potential to be a promising alternative to focused ion beam preparation for micromechanical objects since it is relatively fast, efficient and implants no ions.
Author Grolimund, D.
Van Petegem, S.
Broennimann, R.
Irastorza-Landa, A.
Guitton, A.
Van Swygenhoven, H.
Author_xml – sequence: 1
  givenname: A.
  surname: Guitton
  fullname: Guitton, A.
– sequence: 2
  givenname: A.
  surname: Irastorza-Landa
  fullname: Irastorza-Landa, A.
– sequence: 3
  givenname: R.
  surname: Broennimann
  fullname: Broennimann, R.
– sequence: 4
  givenname: D.
  surname: Grolimund
  fullname: Grolimund, D.
– sequence: 5
  givenname: S.
  surname: Van Petegem
  fullname: Van Petegem, S.
– sequence: 6
  givenname: H.
  surname: Van Swygenhoven
  fullname: Van Swygenhoven, H.
BackLink https://hal.univ-lorraine.fr/hal-01514740$$DView record in HAL
BookMark eNo9kEFLxDAUhHNYwV31H3joUQ-teW2aNMdlUVdY0IOCt_CaJtglbWrSFfz3tlY8Dbw3MzDfhqx63xtCroFmQIHfHbMOR2fGLKdQZpRnAHJF1tNLpKUQ7-dkE-ORUsokZWsiX1rto9G-b5Lh5KJpEofRhMT6kHStDj5qdCaJ2A2TDMEMGHBsfX9JzixOgas_vSBvD_evu316eH582m0PqWYFG1PNiwabAmstKyu0qEFygSWgFdLYnJe1ZLKxPG-AFTUCCsmpqAwF4LapoLggt0vvBzo1hLbD8K08tmq_Paj5Nu0EJhj9mr03i3cI_vNk4qi6NmrjHPbGn6ICIWhR5fS3li3WeWIMxv53A1UzSXVUC0k1k1SUq4lk8QOHomxd
CitedBy_id crossref_primary_10_1364_OE_383724
crossref_primary_10_1016_j_jmps_2017_04_010
crossref_primary_10_1007_s11340_016_0244_0
crossref_primary_10_1016_j_actamat_2016_04_011
Cites_doi 10.1557/jmr.2009.0396
10.1116/1.1368670
10.1116/1.582300
10.1080/14786435.2012.704422
10.1016/S0304-3991(02)00193-6
10.1063/1.2358204
10.1016/j.actamat.2013.10.002
10.1016/j.actamat.2012.02.043
10.1103/PhysRevB.66.115404
10.1016/j.actamat.2008.05.030
10.1007/BF01567637
10.1016/j.msea.2005.03.036
10.1007/BF01567638
10.1007/s11837-010-0178-4
10.1016/j.jmatprotec.2004.02.003
10.1016/j.scriptamat.2010.02.013
10.1103/PhysRevB.76.184119
ContentType Journal Article
Copyright Attribution - NonCommercial - NoDerivatives
Copyright_xml – notice: Attribution - NonCommercial - NoDerivatives
DBID AAYXX
CITATION
7SR
8BQ
8FD
JG9
1XC
VOOES
DOI 10.1016/j.matlet.2015.06.119
DatabaseName CrossRef
Engineered Materials Abstracts
METADEX
Technology Research Database
Materials Research Database
Hyper Article en Ligne (HAL)
Hyper Article en Ligne (HAL) (Open Access)
DatabaseTitle CrossRef
Materials Research Database
Engineered Materials Abstracts
Technology Research Database
METADEX
DatabaseTitleList Materials Research Database
DeliveryMethod fulltext_linktorsrc
Discipline Engineering
Physics
EndPage 591
ExternalDocumentID oai_HAL_hal_01514740v1
10_1016_j_matlet_2015_06_119
GroupedDBID --K
--M
-~X
.~1
0R~
1B1
1~.
1~5
29M
4.4
457
4G.
5GY
5VS
7-5
71M
8P~
9JN
AABNK
AABXZ
AACTN
AAEDT
AAEDW
AAEPC
AAIKJ
AAKOC
AALRI
AAOAW
AAQFI
AAXKI
AAXUO
AAYXX
ABFNM
ABJNI
ABMAC
ABXDB
ABXRA
ACDAQ
ACGFS
ACIWK
ACNNM
ACRLP
ADBBV
ADEZE
AEBSH
AEKER
AENEX
AEZYN
AFJKZ
AFKWA
AFRZQ
AFTJW
AGHFR
AGUBO
AGYEJ
AHHHB
AIEXJ
AIKHN
AITUG
AJOXV
AKRWK
ALMA_UNASSIGNED_HOLDINGS
AMFUW
AMRAJ
ASPBG
AVWKF
AXJTR
AZFZN
BKOJK
BLXMC
CITATION
CS3
EBS
EFJIC
EJD
EO8
EO9
EP2
EP3
F5P
FDB
FEDTE
FGOYB
FIRID
FNPLU
FYGXN
G-2
G-Q
GBLVA
HVGLF
HZ~
IHE
J1W
KOM
M24
M41
MAGPM
MO0
N9A
O-L
O9-
OAUVE
OZT
P-8
P-9
P2P
PC.
Q38
R2-
RIG
RNS
ROL
RPZ
SDF
SDG
SDP
SES
SEW
SMS
SPC
SPCBC
SPD
SSM
SSZ
T5K
WUQ
XPP
ZMT
~02
~G-
7SR
8BQ
8FD
JG9
1XC
VOOES
ID FETCH-LOGICAL-c434t-c63dad3abc98f7c7b1967a51af79ef265b949df62d143ba1a796078e0116fd813
ISSN 0167-577X
IngestDate Tue Oct 15 15:55:59 EDT 2024
Fri Oct 25 05:07:08 EDT 2024
Thu Sep 26 16:02:50 EDT 2024
IsDoiOpenAccess true
IsOpenAccess true
IsPeerReviewed true
IsScholarly true
Keywords Laser processing
Metals and alloys
X-ray techniques
Small scale mechanical testing
Defects
Language English
License Attribution - NonCommercial - NoDerivatives: http://creativecommons.org/licenses/by-nc-nd
LinkModel OpenURL
MergedId FETCHMERGED-LOGICAL-c434t-c63dad3abc98f7c7b1967a51af79ef265b949df62d143ba1a796078e0116fd813
Notes ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ORCID 0000-0002-1508-787X
OpenAccessLink https://hal.univ-lorraine.fr/hal-01514740
PQID 1770382081
PQPubID 23500
PageCount 3
ParticipantIDs hal_primary_oai_HAL_hal_01514740v1
proquest_miscellaneous_1770382081
crossref_primary_10_1016_j_matlet_2015_06_119
PublicationCentury 2000
PublicationDate 2015-12-01
PublicationDateYYYYMMDD 2015-12-01
PublicationDate_xml – month: 12
  year: 2015
  text: 2015-12-01
  day: 01
PublicationDecade 2010
PublicationTitle Materials letters
PublicationYear 2015
Publisher Elsevier
Publisher_xml – name: Elsevier
References Zimmermann (10.1016/j.matlet.2015.06.119_bib9) 2012; 60
Phillips (10.1016/j.matlet.2015.06.119_bib11) 2000; 18
Maaß (10.1016/j.matlet.2015.06.119_bib8) 2006; 89
Heyer (10.1016/j.matlet.2015.06.119_bib5) 2013; 62
Schäfer (10.1016/j.matlet.2015.06.119_bib16) 2002; 66
Bei (10.1016/j.matlet.2015.06.119_bib6) 2008; 56
Kempshall (10.1016/j.matlet.2015.06.119_bib10) 2001; 19
10.1016/j.matlet.2015.06.119_bib12
Bouilly (10.1016/j.matlet.2015.06.119_bib17) 2007; 76
Barabash (10.1016/j.matlet.2015.06.119_bib18) 2005
Meijer (10.1016/j.matlet.2015.06.119_bib15) 2004; 149
Hutchinson (10.1016/j.matlet.2015.06.119_bib7) 2003; 94
Motz (10.1016/j.matlet.2015.06.119_bib3) 2012
Armstrong (10.1016/j.matlet.2015.06.119_bib4) 2009; 24
Thilly (10.1016/j.matlet.2015.06.119_bib1) 2012; 92
Zimmermann (10.1016/j.matlet.2015.06.119_bib20) 2010; 62
Chichkov (10.1016/j.matlet.2015.06.119_bib13) 1996; 63
Barabash (10.1016/j.matlet.2015.06.119_bib19) 2005; 400–401
Jandeleit (10.1016/j.matlet.2015.06.119_bib14) 1996; 63
Van Swygenhoven (10.1016/j.matlet.2015.06.119_bib2) 2010; 62
References_xml – volume: 24
  start-page: 32683276
  year: 2009
  ident: 10.1016/j.matlet.2015.06.119_bib4
  article-title: Measuring anisotropy in Young's modulus of copper using microcantilever testing
  publication-title: J. Mater. Res.
  doi: 10.1557/jmr.2009.0396
  contributor:
    fullname: Armstrong
– volume: 19
  start-page: 749
  year: 2001
  ident: 10.1016/j.matlet.2015.06.119_bib10
  article-title: Ion channeling effects on the focused ion beam milling of Cu
  publication-title: J. Vac. Sci. Technol. B
  doi: 10.1116/1.1368670
  contributor:
    fullname: Kempshall
– volume: 18
  start-page: 1061
  year: 2000
  ident: 10.1016/j.matlet.2015.06.119_bib11
  article-title: Channeling effects during focused-ion-beam micromachining of copper
  publication-title: J. Vac. Sci. Technol. A: Vac. Surf. Films
  doi: 10.1116/1.582300
  contributor:
    fullname: Phillips
– volume: 92
  start-page: 3315
  year: 2012
  ident: 10.1016/j.matlet.2015.06.119_bib1
  article-title: In situ deformation of micro-objects as a tool to uncover the micro-mechanisms of the brittle-to-ductile transition in semiconductors: the case of indium antimonide
  publication-title: Philos. Mag.
  doi: 10.1080/14786435.2012.704422
  contributor:
    fullname: Thilly
– volume: 94
  start-page: 37
  year: 2003
  ident: 10.1016/j.matlet.2015.06.119_bib7
  article-title: A comparison of EDS microanalysis in FIB-prepared and electropolished TEM thin foils
  publication-title: Ultramicroscopy
  doi: 10.1016/S0304-3991(02)00193-6
  contributor:
    fullname: Hutchinson
– volume: 89
  start-page: 151905
  year: 2006
  ident: 10.1016/j.matlet.2015.06.119_bib8
  article-title: Defect structure in micropillars using x-ray microdiffraction
  publication-title: Appl. Phys. Lett.
  doi: 10.1063/1.2358204
  contributor:
    fullname: Maaß
– volume: 62
  start-page: 225
  year: 2013
  ident: 10.1016/j.matlet.2015.06.119_bib5
  article-title: Microshear deformation of gold single crystals
  publication-title: Acta Mater.
  doi: 10.1016/j.actamat.2013.10.002
  contributor:
    fullname: Heyer
– volume: 60
  start-page: 4604
  year: 2012
  ident: 10.1016/j.matlet.2015.06.119_bib9
  article-title: Slip in directionally solidified Mo-alloy micropillars – Part I: nominally dislocation-free pillars
  publication-title: Acta Mater.
  doi: 10.1016/j.actamat.2012.02.043
  contributor:
    fullname: Zimmermann
– volume: 66
  start-page: 115404
  year: 2002
  ident: 10.1016/j.matlet.2015.06.119_bib16
  article-title: Metal ablation by picosecond laser pulses: a hybrid simulation
  publication-title: Phys. Rev. B
  doi: 10.1103/PhysRevB.66.115404
  contributor:
    fullname: Schäfer
– volume: 56
  start-page: 4762
  year: 2008
  ident: 10.1016/j.matlet.2015.06.119_bib6
  article-title: Effects of pre-strain on the compressive stress–strain response of Mo-alloy single-crystal micropillars
  publication-title: Acta Mater.
  doi: 10.1016/j.actamat.2008.05.030
  contributor:
    fullname: Bei
– volume: 63
  start-page: 109
  year: 1996
  ident: 10.1016/j.matlet.2015.06.119_bib13
  article-title: Femtosecond, picosecond and nanosecond laser ablation of solids
  publication-title: Appl. Phys. Lett. A.
  doi: 10.1007/BF01567637
  contributor:
    fullname: Chichkov
– start-page: 209
  year: 2012
  ident: 10.1016/j.matlet.2015.06.119_bib3
  contributor:
    fullname: Motz
– volume: 400–401
  start-page: 125
  year: 2005
  ident: 10.1016/j.matlet.2015.06.119_bib19
  article-title: Gradients of geometrically necessary dislocations from white beam microdiffraction
  publication-title: Mater. Sci. Eng. A
  doi: 10.1016/j.msea.2005.03.036
  contributor:
    fullname: Barabash
– volume: 63
  start-page: 117
  year: 1996
  ident: 10.1016/j.matlet.2015.06.119_bib14
  article-title: Picosecond laser ablation of thin copper films
  publication-title: Appl. Phys. A
  doi: 10.1007/BF01567638
  contributor:
    fullname: Jandeleit
– volume: 62
  start-page: 36
  year: 2010
  ident: 10.1016/j.matlet.2015.06.119_bib2
  article-title: The use of Laue microdiffraction to study small-scale plasticity
  publication-title: J. Miner. Met. Mater. Soc.
  doi: 10.1007/s11837-010-0178-4
  contributor:
    fullname: Van Swygenhoven
– ident: 10.1016/j.matlet.2015.06.119_bib12
– volume: 149
  start-page: 2
  year: 2004
  ident: 10.1016/j.matlet.2015.06.119_bib15
  article-title: Laser beam machining (LBM), state of the art and new opportunities
  publication-title: J. Mater. Proces. Technol.
  doi: 10.1016/j.jmatprotec.2004.02.003
  contributor:
    fullname: Meijer
– volume: 62
  start-page: 746
  year: 2010
  ident: 10.1016/j.matlet.2015.06.119_bib20
  article-title: Effects of focused ion beam milling and pre-straining on the microstructure of directionally solidified molybdenum pillars: a Laue diffraction analysis
  publication-title: Scr. Mater.
  doi: 10.1016/j.scriptamat.2010.02.013
  contributor:
    fullname: Zimmermann
– volume: 76
  start-page: 184119
  year: 2007
  ident: 10.1016/j.matlet.2015.06.119_bib17
  article-title: Damage in materials following ablation by ultrashort laser pulses: a molecular-dynamics study
  publication-title: Phys. Rev. B
  doi: 10.1103/PhysRevB.76.184119
  contributor:
    fullname: Bouilly
– year: 2005
  ident: 10.1016/j.matlet.2015.06.119_bib18
  article-title: Microdiffraction analysis of hierarchical dislocation organization
  contributor:
    fullname: Barabash
SSID ssj0004904
Score 2.2208133
Snippet Ultra short pulsed laser ablation is applied for preparing samples suitable for micromechanical testing. Laue microdiffraction shows that the micromachining...
SourceID hal
proquest
crossref
SourceType Open Access Repository
Aggregation Database
StartPage 589
SubjectTerms Chemical Sciences
Damage
Engineering Sciences
Implants
Ion beams
Laser ablation
Material chemistry
Micromachining
Microstructure
Pulsed lasers
Title Picosecond pulsed laser for microscale sample preparation
URI https://search.proquest.com/docview/1770382081
https://hal.univ-lorraine.fr/hal-01514740
Volume 160
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1Nb9QwELWgCAkOCAqIpYAC4rZKtE7sOD6uKO0WlqqCVurNchJHbcVmq92khx747czY-dq2h8IlihLLSvxG45nxmxlCPoeSZ5Il0o8ynvuM6tRPhU58w6z1Clozw3jHj8N4dsK-nfLTnqtqs0uqNMiu78wr-R9U4Rngilmy_4BsNyk8gHvAF66AMFzvhfHROdLNM0xBuaxhj8vHYAublaUOLpBptwYEzHitsQQwlgNwhb4bJNo-Trpy3zr-bVN7OiN7vz6v2pbTZbUcHMAfrDSSKq-1P8dAhB0RDBx7ZMwsmu7LP7sX-9ggaFG7SPZuMIw3UH6Du9EmwgxjkqBrubAd73ul6roENGqRuzZBzQ7LXX-uW8rbxREuAjDV4YeRdsextiptdOpGrezZ9Jc62t1T84PD75tvu6LZs-lcnQGmMA1lgk2uwEl-FII-QkUY_OmZQExOuhLw-B9thqWlAd7-mA0L5uEZ8mdvbOPWNjl-Tp41ToU3dRLygjww5TZ5Oig1uU0eW6pvtn5JZC81npMaz0qNB1Lj9VLjOanxBlLzipzsfT3-MvObBhp-xiJW-Vkc5TqPdJrJpBCZSEHdCs2pLoQ0RRjzVDKZF3GYg9WcaqoF-LMiMXg4V-QJjV6TrXJZmjfE4zQ2oaERWM85jE20Ade2CHWRm0ksEzEifrso6tLVSVEtgfBCuUVUuIhqEoPXKUfkE2LTDr0brxH52C6sAq2HR1m6NMt6raiAnQqM14S-vc9EO-RJL8rvyFa1qs17MCar9IMVhb_Ul3Uu
link.rule.ids 230,315,783,787,888,27936,27937
linkProvider Elsevier
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Picosecond+pulsed+laser+for+microscale+sample+preparation&rft.jtitle=Materials+letters&rft.au=Guitton%2C+Antoine&rft.au=Irastorza-Landa%2C+A.&rft.au=Broennimann%2C+R.&rft.au=Grolimund%2C+D.&rft.date=2015-12-01&rft.pub=Elsevier&rft.issn=0167-577X&rft.volume=160&rft.spage=589&rft.epage=591&rft_id=info:doi/10.1016%2Fj.matlet.2015.06.119&rft.externalDBID=HAS_PDF_LINK&rft.externalDocID=oai_HAL_hal_01514740v1
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0167-577X&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0167-577X&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0167-577X&client=summon