Picosecond pulsed laser for microscale sample preparation

Ultra short pulsed laser ablation is applied for preparing samples suitable for micromechanical testing. Laue microdiffraction shows that the micromachining hardly damages the initial microstructure. The technique has the potential to be a promising alternative to focused ion beam preparation for mi...

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Bibliographic Details
Published inMaterials letters Vol. 160; pp. 589 - 591
Main Authors Guitton, A., Irastorza-Landa, A., Broennimann, R., Grolimund, D., Van Petegem, S., Van Swygenhoven, H.
Format Journal Article
LanguageEnglish
Published Elsevier 01.12.2015
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Summary:Ultra short pulsed laser ablation is applied for preparing samples suitable for micromechanical testing. Laue microdiffraction shows that the micromachining hardly damages the initial microstructure. The technique has the potential to be a promising alternative to focused ion beam preparation for micromechanical objects since it is relatively fast, efficient and implants no ions.
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ISSN:0167-577X
DOI:10.1016/j.matlet.2015.06.119