Characteristics of thickness-vibration-mode PZT transducer for acoustic micropumps

• Published in: Sensors and actuators. A. Physical. Vol. 332; p. 113206
• Main Authors: Yun, Hao, Kong, Deqing, Aoyagi, Manabu
• Format: Journal Article
• Language: English
• Published: Lausanne Elsevier B.V 01.12.2021; Elsevier BV
• Subjects: Acoustic driving force; Acoustics; Acoustofluidics; Flow velocity; Heat transfer; Lead zirconate titanates; Measurement methods; Micropump; Micropumps; Pressure; Thickness; Transducers; Ultrasonic; Vibration; Water levels; Acoustofluidics; Acoustic driving force; Ultrasonic; Micropump
• ISSN: 0924-4247; 1873-3069
• DOI: 10.1016/j.sna.2021.113206

The characteristics of a thickness-vibration-mode PZT transducer for acoustic micropumps are evaluated with a U-shaped tube structure. The phenomenon in which the height of the water level can be increased in a U-shaped tube due to the acoustic driving force was used to develop measurement methods for the output pressure and flow rate of the acoustic micropump driven by a PZT transducer. The measurement results showed that the output pressure increases from 22.6 to 37.6 Pa and the flow rate increases from 3.6 to 6.4 ml/min when input voltages of 68–105 Vpp are applied to the PZT transducer and the height of water level is 30 cm above the PZT transducer. To discuss the effect of backpressure, the output characteristics of pressure and flow at water height levels of 31 and 32 cm were measured for comparison with those at 30 cm. [Display omitted] •Characteristics of a thickness-vibration-mode PZT transducer were evaluated by a U-shaped tube for studying micropumps.•The mechanism of acoustic driving force is used to illustrate the driving principle of the acoustic micropumps.•Output pressure and flow rate of the micropump are achieved 22.6 to 37.6 Pa and 3.6 to 6.4 ml/min under 68–105 Vpp.