Focused ion beam-shaped microtools for ultra-precision machining of cylindrical components

• Published in: Precision engineering Vol. 27; no. 1; pp. 59 - 69
• Main Authors: Picard, Y.N, Adams, D.P, Vasile, M.J, Ritchey, M.B
• Format: Journal Article
• Language: English
• Published: New York, NY Elsevier Inc 2003; Elsevier Science
• Subjects: Applied sciences; Diamond tool; Exact sciences and technology; Focused ion beam; Mechanical engineering. Machine design; Microcoil; Microtool; Precision engineering, watch making; Ultra-precision machining; Microtool; Diamond tool; Ultra-precision machining; Microcoil; Focused ion beam
• ISSN: 0141-6359; 1873-2372
• DOI: 10.1016/S0141-6359(02)00188-5

Focused ion beam (FIB) sputtering is used to shape a variety of cutting tools with dimensions in the 15–100 μm range and cutting edge radii of curvature of 40 nm. The shape of each microtool is controlled to a pre-specified geometry that includes rake and relief features. We demonstrate tools having rectangular, triangular, and other complex-shaped face designs. A double-triangle tip on one tool is unique and demonstrates the versatility of the fabrication process. The FIB technique allows observation of the tool during fabrication, and, thus, reproducible features are generated with sub-micron precision. Tools are made from tungsten carbide, high-speed tool steel, and single crystal diamond. Application of FIB-shaped tools in ultra-precision microgrooving tests shows that the cross-section of a machined groove is an excellent replication of the microtool face. Microgrooves on 40–150 μm pitch are cut into 3 mm diameter polymer rods, for groove arc lengths greater than 12 cm. The surface finish of machined features is also reported; groove roughness ( R a) is typically less than 0.2 μm. Ultra-precision machining of cylindrical substrates is extended to make bound metal microcoils having feature sizes of 20–40 μm.