High-Q microwave acoustic resonators and filters

• Published in: IEEE transactions on microwave theory and techniques Vol. 41; no. 12; pp. 2139 - 2146
• Main Authors: Lakin, K.M., Kline, G.R., McCarron, K.T.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01.12.1993; Institute of Electrical and Electronics Engineers
• Subjects: Applied sciences; Bandwidth; Circuit properties; Delay lines; Electric, optical and optoelectronic circuits; Electrodes; Electronics; Exact sciences and technology; Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits; Microwave devices; Microwave filters; Microwave oscillators; Phase noise; Piezoelectric films; Resonator filters; Substrates; Circuit design; Equivalent circuit; Microwave circuit; Microwave resonator; Microwave filter; Acoustic wave filter; Modeling
• ISSN: 0018-9480; 1557-9670
• DOI: 10.1109/22.260698

The authors present recent experimental and modeling results for high-Q microwave acoustic resonators and filters for use in oscillators and other frequency control applications. Overmoded resonators have exhibited an FQ product greater than 1*10/sup 14/ Hz (e.g., Q=68,000 at 1.6 GHz) with a strong inductive response suitable for one-port and two-port oscillator feedback circuits. Ladder filters fabricated with overmoded resonators have loaded Qs greater than 40,000 with 76-kHz bandwidth at 1.6 GHz. Aluminum nitride films were used for transduction on Z-cut sapphire and lithium niobate substrates.< >