Ion and neutral temperatures in an electron cyclotron resonance plasma

• Published in: Thin solid films Vol. 390; no. 1; pp. 208 - 211
• Main Authors: Yonesu, Akira, Shinohara, Shunjiro, Yamashiro, Yasumasa, Kawai, Yoshinobu
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Lausanne Elsevier B.V 30.06.2001; Elsevier Science
• Subjects: Atomic, molecular, ion, and heavy-particle collisions; ECR plasma; Elementary processes in plasma; Exact sciences and technology; Ion temperature; Neutral temperature; Neutrals in plasma; Optical emission spectroscopy; Physics; Physics of gases, plasmas and electric discharges; Physics of plasmas and electric discharges; Plasma heating (beam injection, radio-frequency and microwave, ohmic, icr, ecr and current drive heating); Plasma production and heating; Plasma properties; Potential fluctuation; Neutral temperature; Optical emission spectroscopy; ECR plasma; Ion temperature; Potential fluctuation; Neutral gas temperature; Light emission; Emission spectroscopy; Phase fluctuation; Plasma potential; ECR heating; Experimental study; Neutral particles; Plasma heating
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/S0040-6090(01)00921-X

Transverse ion and neutral temperatures at the electron cyclotron resonance position were measured in an electron cyclotron resonance (ECR) plasma using a high-resolution optical emission spectroscopy of Doppler profiles of Ar and Ar + transition. The transverse ion temperature increase from approximately 0.4 to 1.0 eV as the operating gas pressure is lowered from 1.0 to 0.1 mTorr. On the other hand, the transverse neutral temperature is much lower than the transverse ion temperature. By means of Langmuir probe measurement, large-amplitude potential fluctuation was observed at the ECR position under the low gas pressure. These observations suggest that the large-amplitude potential fluctuation directly affects the transverse ion temperature.