APA (7th ed.) Citation

Phan, H., Dao, D. V., Nakamura, K., Dimitrijev, S., & Nguyen, N. (2015). The Piezoresistive Effect of SiC for MEMS Sensors at High Temperatures: A Review. Journal of microelectromechanical systems, 24(6), 1663-1677. https://doi.org/10.1109/JMEMS.2015.2470132

Chicago Style (17th ed.) Citation

Phan, Hoang-Phuong, Dzung Viet Dao, Koichi Nakamura, Sima Dimitrijev, and Nam-Trung Nguyen. "The Piezoresistive Effect of SiC for MEMS Sensors at High Temperatures: A Review." Journal of Microelectromechanical Systems 24, no. 6 (2015): 1663-1677. https://doi.org/10.1109/JMEMS.2015.2470132.

MLA (9th ed.) Citation

Phan, Hoang-Phuong, et al. "The Piezoresistive Effect of SiC for MEMS Sensors at High Temperatures: A Review." Journal of Microelectromechanical Systems, vol. 24, no. 6, 2015, pp. 1663-1677, https://doi.org/10.1109/JMEMS.2015.2470132.