Lubrication of sliding silicon MEMS devices using ferrofluids‐based magnetic matrix texture

• Published in: Micro & nano letters Vol. 16; no. 1; pp. 44 - 50
• Main Authors: Tonggang, Liu, Chhattal, Muhammad, Kun, You, Zili, Lin
• Format: Journal Article
• Language: English
• Published: Stevenage John Wiley & Sons, Inc 01.01.2021; Wiley
• Subjects: Bearing capacity; Configuration management; Configurations; Ferrofluids; Friction; Investigations; Lubricants & lubrication; Lubricating properties; Magnetic fields; Magnetic properties; Magnets; Microelectromechanical systems; Morphology; Nanoparticles; Optical microscopes; Optical properties; Silicon; Surface layers; Surfactants; Texture; Tribology; Viscosity
• ISSN: 1750-0443; 1750-0443
• DOI: 10.1049/mna2.12007

This paper aims to explore the possibility of using ferrofluids for the lubrication of MEMS devices under the influence of different magnetic field texture configurations. For the investigation of proposed work, a novel silicon‐based pin‐on‐disk friction pair is designed in such a way that it mimics MEMS devices. The ferrofluids‐based magnetic matrix texture was formed by low viscous ferrofluids and specially arranged thin cylindrical magnets matrix. For the investigation of the lubrication performance of ferrofluids lubricated specimens, tribological tests, and surface morphology analysis were carried out under different magnetic textures on a reciprocating tribometer and an optical microscope. The results show that the magnetic textures distributions on the friction‐pair have a significant influence on the lubrication properties of ferrofluids. This magnetic texture has the potential to properly position and retains the ferrofluids on friction‐pair, increase the load‐bearing capacity, and result in a significant reduction in wear and friction. The results also show that there exists the optimal magnetic matrix texture configuration which shows the best tribological performance when lubricated with ferrofluids.