Research and verification of similar laws in valveless piezoelectric micropumps

• Published in: Micro & nano letters Vol. 16; no. 5; pp. 281 - 289
• Main Authors: He, Xiuhua, Shan, Chunming, Yang, Hang
• Format: Journal Article
• Language: English
• Published: Stevenage John Wiley & Sons, Inc 01.04.2021; Wiley
• Subjects: Accuracy; Design and modelling of MEMS and NEMS devices; Dimensionless analysis; Experiments; Fabrication of MEMS and NEMS devices; Mathematical models; Microactuators; Micropumps; Numerical analysis; Other numerical methods; Outlet flow; Piezoelectric devices; Piezoelectricity; Prototypes; Simulation; Viscosity
• ISSN: 1750-0443; 1750-0443
• DOI: 10.1049/mna2.12041

Due to the constraints of actual conditions, large‐scale research and analysis of micropumps are difficult to achieve. In this paper, the micropump is divided into a vibrating part and a flowing part through a similar theory research method, and the two parts of the mathematical model are simplified and dimensionless‐processed. Then, the similar relationship between the prototype machine and the model machine is proposed, the conversion relationship between the prototype machine and the model machine is obtained. In order to verify the correctness of the theoretical analysis, this paper uses ANSYS CFX analysis software to perform numerical analysis on a pair of prototype machines and model machines when the angle of diffusion and contraction is 30°. The size ratio of the prototype and model is 1/2. At the same time, experiments were used to verify the accuracy of numerical analysis by comparing the experimental value and the simulated value of the micropump outlet flow when the frequency is 100 Hz and the voltages are 25Vpp, 50Vpp, 75Vpp, 100Vpp, and 125Vpp. The results obtained by numerical simulation and experimental methods are consistent with theoretical analysis, thus verifying the accuracy of similar theories. The research results can provide the theoretical basis for the experimental research of the piezoelectric pump and also provide guidance for the design of the piezoelectric pump