An XPS study of the angular dependence of preferential sputtering and ion-induced reduction in lead oxide-containing glasses
The power of XPS for the characterization of low energy ion-irradiated surfaces is demonstrated through the detailed study of surface stoichiometry and oxidation state changes in a lead oxide-containing glass under 5 keV argon-ion bombardment. The variation of extent of ion-induced reduction of lead...
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Published in | Vacuum Vol. 34; no. 6; pp. 659 - 662 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Oxford
Elsevier Ltd
01.06.1984
Elsevier |
Subjects | |
Online Access | Get full text |
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Summary: | The power of XPS for the characterization of low energy ion-irradiated surfaces is demonstrated through the detailed study of surface stoichiometry and oxidation state changes in a lead oxide-containing glass under 5 keV argon-ion bombardment. The variation of extent of ion-induced reduction of lead oxide to lead metal, and of preferential sputtering of lead over silicon, with the angle of incidence of the primary ion beam (from normal incidence to 75°to the normal) was investigated. Angle-resolved XPS studies at sputter-equilibrium reveal the presence of a uniform metallic lead-containing ion-damaged overlayer, and a non-uniform lead oxide depleted overlayer under all conditions. The extent of both preferential sputtering of lead and ion-induced reduction to lead metal is shown to be least for grazing angles of ion incidence, and greatest for normal incidence. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 0042-207X 1879-2715 |
DOI: | 10.1016/0042-207X(84)90058-7 |